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Tigard, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Monitoring surface oxide on seed layers during electroplating
Patent number
11,208,732
Issue date
Dec 28, 2021
Lam Research Corporation
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Monitoring surface oxide on seed layers during electroplating
Patent number
10,443,146
Issue date
Oct 15, 2019
Lam Research Corporation
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method and apparatus for electroplating semiconductor wafer when co...
Patent number
9,816,196
Issue date
Nov 14, 2017
Novellus Systems, Inc.
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Membrane design for reducing defects in electroplating systems
Patent number
9,677,190
Issue date
Jun 13, 2017
Lam Research Corporation
Doyeon Kim
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
Information
Patent Application
IMPROVING SUBSTRATE WETTABILITY FOR PLATING OPERATIONS
Publication number
20210366768
Publication date
Nov 25, 2021
LAM RESEARCH CORPORATION
Zhian HE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONITORING SURFACE OXIDE ON SEED LAYERS DURING ELECTROPLATING
Publication number
20190390361
Publication date
Dec 26, 2019
LAM RESEARCH CORPORATION
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
MONITORING SURFACE OXIDE ON SEED LAYERS DURING ELECTROPLATING
Publication number
20180282894
Publication date
Oct 4, 2018
LAM RESEARCH CORPORATION
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
Publication number
20180030611
Publication date
Feb 1, 2018
Novellus Systems, Inc.
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR CHARACTERIZING METAL OXIDE REDUCTION
Publication number
20160111342
Publication date
Apr 21, 2016
LAM RESEARCH CORPORATION
Ludan Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MEMBRANE DESIGN FOR REDUCING DEFECTS IN ELECTROPLATING SYSTEMS
Publication number
20150122658
Publication date
May 7, 2015
LAM RESEARCH CORPORATION
Doyeon Kim
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ELECTROPLATING APPARATUSES AND METHODS EMPLOYING LIQUID PARTICLE CO...
Publication number
20140001050
Publication date
Jan 2, 2014
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
Publication number
20130284604
Publication date
Oct 31, 2013
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR