Ludovic Godet

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Treize Vents, FR

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Patents Grantslast 30 patents

Information Patent Grant
Monitoring plasma ion implantation systems for fault detection and...
- Patent number 7,878,145
- Issue date Feb 1, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Ziwei Fang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Monitoring plasma ion implantation systems for fault detection and...
- Publication number 20080026133
- Publication date Jan 31, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Ziwei Fang
- H01 - BASIC ELECTRIC ELEMENTS