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Ludovic Lattard
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Delft, NL
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Patents Grants
last 30 patents
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Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
11,738,376
Issue date
Aug 29, 2023
ASML Netherlands, B.V.
Marc Smits
B08 - CLEANING
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Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
10,987,705
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
10,632,509
Issue date
Apr 28, 2020
ASML Netherlands B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
9,981,293
Issue date
May 29, 2018
Mapper Lithography IP B.V.
Marc Smits
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20210237129
Publication date
Aug 5, 2021
ASML NETHERLANDS B.V.
Marc SMITS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20200230665
Publication date
Jul 23, 2020
ASML Netherlands B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20180236505
Publication date
Aug 23, 2018
MAPPER LITHOGRAPHY IP BV
Marc Smits
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20170304878
Publication date
Oct 26, 2017
MAPPER LITHOGRAPHY IP BV
Marc Smits
B08 - CLEANING