Luigi Scaccabarozzi

Person

Warkenswaard, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Membranes for use within a lithographic apparatus and a lithographi...
- Patent number 10,698,312
- Issue date Jun 30, 2020
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Suppression filter, radiation collector and radiation source for a...
- Patent number 10,678,140
- Issue date Jun 9, 2020
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Membranes for use within a lithographic apparatus and a lithographi...
- Patent number 10,228,615
- Issue date Mar 12, 2019
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus
- Patent number 10,139,725
- Issue date Nov 27, 2018
- ASML Netherlands B.V.
- James Norman Wiley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method of manufacturing a device
- Patent number 9,606,445
- Issue date Mar 28, 2017
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,563,137
- Issue date Feb 7, 2017
- ASML Netherlands B.V.
- Nicolaas Arnoldus Lammers
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for inspection of articles, EUV lithography r...
- Patent number 9,488,922
- Issue date Nov 8, 2016
- ASML Netherlands B.V.
- Yuri Vainer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source apparatus, lithographic apparatus, method of gener...
- Patent number 9,298,110
- Issue date Mar 29, 2016
- ASML Netherlands B.V.
- Jens Arno Steinhoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Object inspection systems and methods
- Patent number 9,122,178
- Issue date Sep 1, 2015
- ASML Netherlands B.V.
- Vitalii Ivanov
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus
- Patent number 8,830,455
- Issue date Sep 9, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Particle cleaning of optical elements for microlithography
- Patent number 8,477,285
- Issue date Jul 2, 2013
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of detecting a particle and a lithographic apparatus
- Patent number 8,405,825
- Issue date Mar 26, 2013
- ASML Netherlands B.V.
- Luigi Scaccabarozzi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...
- Publication number 20190146332
- Publication date May 16, 2019
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G02 - OPTICS
Information Patent Application
SUPPRESSION FILTER, RADIATION COLLECTOR AND RADIATION SOURCE FOR A...
- Publication number 20180246414
- Publication date Aug 30, 2018
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...
- Publication number 20170205704
- Publication date Jul 20, 2017
- ASML NETHERLANDS B.V.
- Andrey Alexandrovich NIKIPELOV
- G02 - OPTICS
Information Patent Application
Lithographic Apparatus
- Publication number 20160033860
- Publication date Feb 4, 2016
- ASML NETHERLANDS B.V.
- James Norman WILEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method of Manufacturing a Device
- Publication number 20150192861
- Publication date Jul 9, 2015
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for Monitoring a Lithographic Patterning Device
- Publication number 20140340663
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus for Inspection of Articles, EUV Lithography R...
- Publication number 20140146297
- Publication date May 29, 2014
- ASML NETHERLANDS B.V.
- Yuri Vainer
- G01 - MEASURING TESTING
Information Patent Application
GAS-LIQUID PHASE TRANSITION METHOD AND APPARATUS FOR CLEANING OF SU...
- Publication number 20140014138
- Publication date Jan 16, 2014
- Jeffrey J. Spiegelman
- B08 - CLEANING
Information Patent Application
Electrostatic Clamp Apparatus And Lithographic Apparatus
- Publication number 20140002805
- Publication date Jan 2, 2014
- ASML Netherelands B.V.
- Vadim Yevgenyevich Banine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...
- Publication number 20130070218
- Publication date Mar 21, 2013
- ASML Netherland B.V.
- Vladimir Vitalevich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Inspection Of Articles, EUV Lithography R...
- Publication number 20120182538
- Publication date Jul 19, 2012
- ASML NETHERLANDS B.V.
- Roelof Koole
- G01 - MEASURING TESTING
Information Patent Application
Object Inspection Systems and Methods
- Publication number 20120127467
- Publication date May 24, 2012
- ASML Netherland B.V.
- Vitalii Ivanov
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120086929
- Publication date Apr 12, 2012
- ASML NETHERLANDS B.V.
- Nicolaas Arnoldus Lammers
- B08 - CLEANING
Information Patent Application
Object Inspection Systems and Methods
- Publication number 20120081684
- Publication date Apr 5, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Oef
- G01 - MEASURING TESTING
Information Patent Application
RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENER...
- Publication number 20110222040
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Jens Arno STEINHOFF
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY
- Publication number 20110188011
- Publication date Aug 4, 2011
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20110170083
- Publication date Jul 14, 2011
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Detecting a Particle and a Lithographic Apparatus
- Publication number 20110149276
- Publication date Jun 23, 2011
- ASML NETHERLANDS B.V.
- Luigi SCACCABAROZZI
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus
- Publication number 20110043795
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...
- Publication number 20110037960
- Publication date Feb 17, 2011
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV Mask Inspection
- Publication number 20100165310
- Publication date Jul 1, 2010
- ASML Holding N.V.
- Harry SEWELL
- G01 - MEASURING TESTING
Information Patent Application
System for Contactless Cleaning, Lithographic Apparatus and Device...
- Publication number 20100151394
- Publication date Jun 17, 2010
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Luigi Scaccabarozzi

Person

Patents Grantslast 30 patents

Membranes for use within a lithographic apparatus and a lithographi...

Suppression filter, radiation collector and radiation source for a...

Membranes for use within a lithographic apparatus and a lithographi...

Lithographic apparatus

Lithographic apparatus and method of manufacturing a device

Lithographic apparatus and device manufacturing method

Methods and apparatus for inspection of articles, EUV lithography r...

Radiation source apparatus, lithographic apparatus, method of gener...

Object inspection systems and methods

Inspection method and apparatus

Particle cleaning of optical elements for microlithography

Method of detecting a particle and a lithographic apparatus

Patents Applicationslast 30 patents

MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...

SUPPRESSION FILTER, RADIATION COLLECTOR AND RADIATION SOURCE FOR A...

MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...

Lithographic Apparatus

Lithographic Apparatus and Method of Manufacturing a Device

Apparatus for Monitoring a Lithographic Patterning Device

Methods and Apparatus for Inspection of Articles, EUV Lithography R...

GAS-LIQUID PHASE TRANSITION METHOD AND APPARATUS FOR CLEANING OF SU...

Electrostatic Clamp Apparatus And Lithographic Apparatus

SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...

Methods and Apparatus for Inspection Of Articles, EUV Lithography R...

Object Inspection Systems and Methods

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Object Inspection Systems and Methods

RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENER...

PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY

Lithographic Apparatus and Device Manufacturing Method

Method of Detecting a Particle and a Lithographic Apparatus

Inspection method and apparatus

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...

EUV Mask Inspection

System for Contactless Cleaning, Lithographic Apparatus and Device...