Luis J. Bernardez

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
In-vacuum exposure shutter
- Patent number 6,744,493
- Issue date Jun 1, 2004
- EUV LLC
- Terry A. Johnson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffraction spectral filter for use in extreme-UV lithography conde...
- Patent number 6,469,827
- Issue date Oct 22, 2002
- EUV LLC
- William C. Sweatt
- G02 - OPTICS