Lukasz Jerzy Macht

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of determining a value of a parameter of interest of a patte...
- Patent number 11,181,828
- Issue date Nov 23, 2021
- ASML Netherlands B.V.
- Patrick Warnaar
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
- Patent number 11,022,892
- Issue date Jun 1, 2021
- ASML Netherlands B.V.
- Patrick Warnaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
- Patent number 10,481,506
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Murat Bozkurt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
- Patent number 10,466,594
- Issue date Nov 5, 2019
- ASML Netherlands B.V.
- Patrick Warnaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,696,638
- Issue date Jul 4, 2017
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Level sensor, a method for determining a height map of a substrate...
- Patent number 9,488,465
- Issue date Nov 8, 2016
- ASML Netherlands B.V.
- Laurent Khuat Duy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,229,340
- Issue date Jan 5, 2016
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Level sensor arrangement for lithographic apparatus and device manu...
- Patent number 8,842,293
- Issue date Sep 23, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Level sensor, lithographic apparatus, and substrate surface positio...
- Patent number 8,675,210
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus
- Patent number 8,570,492
- Issue date Oct 29, 2013
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 8,488,107
- Issue date Jul 16, 2013
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A PATTE...
- Publication number 20200133140
- Publication date Apr 30, 2020
- ASML NETHERLANDS B.V.
- Patrick WARNAAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
- Publication number 20200064744
- Publication date Feb 27, 2020
- ASML NETHERLANDS B.V.
- Patrick WARNAAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
- Publication number 20200050114
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Murat Bozkurt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
- Publication number 20180321599
- Publication date Nov 8, 2018
- ASML NETHERLANDS B.V.
- Murat BOZKURT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
- Publication number 20170248852
- Publication date Aug 31, 2017
- ASML NETHERLANDS B.V.
- Patrick WARNAAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20160109812
- Publication date Apr 21, 2016
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20140022527
- Publication date Jan 23, 2014
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Level Sensor, a Method for Determining a Height Map of a Substrate,...
- Publication number 20130128247
- Publication date May 23, 2013
- ASML NETHERLANDS B.V.
- Laurent KHUAT DUY
- G01 - MEASURING TESTING
Information Patent Application
LEVEL SENSOR, LITHOGRAPHIC APPARATUS, AND SUBSTRATE SURFACE POSITIO...
- Publication number 20130077079
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20120242969
- Publication date Sep 27, 2012
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013879
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Application
LEVEL SENSOR ARRANGEMENT FOR LITHOGRAPHIC APPARATUS AND DEVICE MANU...
- Publication number 20100233600
- Publication date Sep 16, 2010
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Lukasz Jerzy Macht

Person

Patents Grantslast 30 patents

Method of determining a value of a parameter of interest of a patte...

Method of measuring a structure, inspection apparatus, lithographic...

Method of measuring a structure, inspection apparatus, lithographic...

Method of measuring a structure, inspection apparatus, lithographic...

Lithographic apparatus

Level sensor, a method for determining a height map of a substrate...

Lithographic apparatus

Level sensor arrangement for lithographic apparatus and device manu...

Level sensor, lithographic apparatus, and substrate surface positio...

Lithographic apparatus

Lithographic apparatus and device manufacturing method involving a...

Patents Applicationslast 30 patents

METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A PATTE...

Method of Measuring a Structure, Inspection Apparatus, Lithographic...

Method of Measuring a Structure, Inspection Apparatus, Lithographic...

Method of Measuring a Structure, Inspection Apparatus, Lithographic...

Method of Measuring a Structure, Inspection Apparatus, Lithographic...

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS

Level Sensor, a Method for Determining a Height Map of a Substrate,...

LEVEL SENSOR, LITHOGRAPHIC APPARATUS, AND SUBSTRATE SURFACE POSITIO...

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LEVEL SENSOR ARRANGEMENT FOR LITHOGRAPHIC APPARATUS AND DEVICE MANU...