Lun-Kuang Tan

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method for reducing line-end space in integrated circuit patterning
- Patent number 12,197,131
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jing-Huei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming same
- Patent number 12,166,127
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi Chen Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,084,762
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ker-hsun Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching apparatus and methods of cleaning thereof
- Patent number 12,080,582
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitride-containing STI liner for SiGe channel
- Patent number 12,046,479
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Wen Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping for semiconductor device with conductive feature
- Patent number 12,015,055
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with doped via plug
- Patent number 11,908,740
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Po Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and a semiconductor...
- Patent number 11,901,442
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Wen Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming same
- Patent number 11,855,092
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi Chen Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping for semiconductor device with conductive feature
- Patent number 11,742,386
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and a semiconductor...
- Patent number 11,677,015
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ya-Wen Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing line-end space in integrated circuit patterning
- Patent number 11,635,695
- Issue date Apr 25, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jing-Huei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 11,631,612
- Issue date Apr 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Hua Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for making multi-gate transistors and resulting structures
- Patent number 11,532,485
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with doped via plug
- Patent number 11,515,206
- Issue date Nov 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Po Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, semiconductor device and method
- Patent number 11,469,108
- Issue date Oct 11, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei Han Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping for semiconductor device with conductive feature
- Patent number 11,450,741
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching apparatus and methods of cleaning thereof
- Patent number 11,222,805
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with doped contact plug and method for form...
- Patent number 11,145,751
- Issue date Oct 12, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Ju Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping for semiconductor device with conductive feature
- Patent number 10,950,694
- Issue date Mar 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for making multi-gate transistors and resulting structures
- Patent number 10,854,471
- Issue date Dec 1, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with doped via plug and method for forming...
- Patent number 10,763,168
- Issue date Sep 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Po Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact silicide having a non-angular profile
- Patent number 10,522,631
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sheng-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for making multi-gate transistors and resulting structures
- Patent number 10,361,094
- Issue date Jul 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping for semiconductor device with conductive feature
- Patent number 10,347,720
- Issue date Jul 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for making multi-gate transistors and resulting structures
- Patent number 10,177,006
- Issue date Jan 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET device and method of forming the same
- Patent number 10,115,639
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping Hung Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET
- Patent number 10,062,787
- Issue date Aug 28, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ting Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact silicide having a non-angular profile
- Patent number 10,032,876
- Issue date Jul 24, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for generating parameter pattern, ion implantation method an...
- Patent number 9,697,989
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Reducing Line-End Space in Integrated Circuit Patterning
- Publication number 20240385526
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Jing-Huei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240384403
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ker-hsun LIAO
- B08 - CLEANING
Information Patent Application
ETCHING APPARATUS AND METHODS OF CLEANING THEREOF
- Publication number 20240355663
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20240145581
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-GATE DEVICE FABRICATION METHODS AND RELATED STRUCTURES
- Publication number 20240120239
- Publication date Apr 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Wei CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Isolation Structures in Semiconductor Devices
- Publication number 20240055476
- Publication date Feb 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Wei CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Epitaxial Structures In Semiconductor Devices
- Publication number 20230402508
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Wei CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NITRIDE-CONTAINING STI LINER FOR SIGE CHANNEL
- Publication number 20230386859
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF FORMATION
- Publication number 20230369395
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Wei CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20230366081
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ker-hsun LIAO
- B08 - CLEANING
Information Patent Application
Doping for Semiconductor Device with Conductive Feature
- Publication number 20230352533
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Hao LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Reducing Line-End Space in Integrated Circuit Patterning
- Publication number 20230259036
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Jing-Huei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20230253246
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hua CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DOPED VIA PLUG
- Publication number 20230093608
- Publication date Mar 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Po HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20220376091
- Publication date Nov 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doping for Semiconductor Device with Conductive Feature
- Publication number 20220367632
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Hao LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, Semiconductor Device and Method
- Publication number 20220359204
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei Han Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Forming Same
- Publication number 20220336459
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi Chen Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS AND METHODS OF CLEANING THEREOF
- Publication number 20220130706
- Publication date Apr 28, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nitride-Containing STI Liner for SiGe Channel
- Publication number 20220051906
- Publication date Feb 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Reducing Line-End Space in Integrated Circuit Patterning
- Publication number 20210389679
- Publication date Dec 16, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Jing-Huei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20210375665
- Publication date Dec 2, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Hua CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20210359111
- Publication date Nov 18, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ya-Wen CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS AND METHODS OF CLEANING THEREOF
- Publication number 20210313212
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doping for Semiconductor Device with Conductive Feature
- Publication number 20210226008
- Publication date Jul 22, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for Making Multi-Gate Transistors and Resulting Structures
- Publication number 20210111035
- Publication date Apr 15, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DOPED VIA PLUG
- Publication number 20200402853
- Publication date Dec 24, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Po HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, Semiconductor Device and Method
- Publication number 20200075337
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei Han Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for Making Multi-Gate Transistors and Resulting Structures
- Publication number 20190348298
- Publication date Nov 14, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DOPED CONTACT PLUG AND METHOD FOR FORM...
- Publication number 20190305107
- Publication date Oct 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Ju CHEN
- H01 - BASIC ELECTRIC ELEMENTS

Lun-Kuang Tan

Person

Patents Grantslast 30 patents

Method for reducing line-end space in integrated circuit patterning

Semiconductor device and method of forming same

Semiconductor processing tool and methods of operation

Etching apparatus and methods of cleaning thereof

Nitride-containing STI liner for SiGe channel

Doping for semiconductor device with conductive feature

Semiconductor structure with doped via plug

Method of manufacturing a semiconductor device and a semiconductor...

Semiconductor device and method of forming same

Doping for semiconductor device with conductive feature

Method of manufacturing a semiconductor device and a semiconductor...

Method for reducing line-end space in integrated circuit patterning

Semiconductor device and manufacturing method thereof

Process for making multi-gate transistors and resulting structures

Semiconductor structure with doped via plug

System, semiconductor device and method

Doping for semiconductor device with conductive feature

Etching apparatus and methods of cleaning thereof

Semiconductor structure with doped contact plug and method for form...

Doping for semiconductor device with conductive feature

Process for making multi-gate transistors and resulting structures

Semiconductor structure with doped via plug and method for forming...

Contact silicide having a non-angular profile

Process for making multi-gate transistors and resulting structures

Doping for semiconductor device with conductive feature

Process for making multi-gate transistors and resulting structures

FinFET device and method of forming the same

FinFET

Contact silicide having a non-angular profile

Method for generating parameter pattern, ion implantation method an...

Patents Applicationslast 30 patents

Method for Reducing Line-End Space in Integrated Circuit Patterning

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

ETCHING APPARATUS AND METHODS OF CLEANING THEREOF

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

MULTI-GATE DEVICE FABRICATION METHODS AND RELATED STRUCTURES

Isolation Structures in Semiconductor Devices

Epitaxial Structures In Semiconductor Devices

NITRIDE-CONTAINING STI LINER FOR SIGE CHANNEL

SEMICONDUCTOR DEVICE AND METHODS OF FORMATION

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

Doping for Semiconductor Device with Conductive Feature

Method for Reducing Line-End Space in Integrated Circuit Patterning

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR STRUCTURE WITH DOPED VIA PLUG

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

Doping for Semiconductor Device with Conductive Feature

System, Semiconductor Device and Method

Semiconductor Device and Method of Forming Same

ETCHING APPARATUS AND METHODS OF CLEANING THEREOF

Nitride-Containing STI Liner for SiGe Channel

Method for Reducing Line-End Space in Integrated Circuit Patterning

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

ETCHING APPARATUS AND METHODS OF CLEANING THEREOF

Doping for Semiconductor Device with Conductive Feature

Process for Making Multi-Gate Transistors and Resulting Structures

SEMICONDUCTOR STRUCTURE WITH DOPED VIA PLUG

System, Semiconductor Device and Method

Process for Making Multi-Gate Transistors and Resulting Structures

SEMICONDUCTOR STRUCTURE WITH DOPED CONTACT PLUG AND METHOD FOR FORM...