Membership
Tour
Register
Log in
Luo Laizhong
Follow
Person
Fremont, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for two-sided etch of a semiconductor substrate
Patent number
6,624,082
Issue date
Sep 23, 2003
Mattson Technology, Inc.
Laizhong Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for two-sided etch of a semiconductor substrate
Patent number
6,335,293
Issue date
Jan 1, 2002
Mattson Technology, Inc.
Laizhong Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum plasma processing wherein workpiece position is detected pri...
Patent number
5,670,066
Issue date
Sep 23, 1997
Lam Research Corporation
Michael S. Barnes
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
Information
Patent Application
Systems and methods for two-sided etch of a semiconductor substrate
Publication number
20020017364
Publication date
Feb 14, 2002
Laizhong Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR TWO-SIDED ETCH OF A SEMICONDUCTOR SUBSTRATE
Publication number
20010009177
Publication date
Jul 26, 2001
LAIZHONG LUO
H01 - BASIC ELECTRIC ELEMENTS