Luogi Chen

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Three-dimensional mask model for photolithography simulation
- Patent number 7,703,069
- Issue date Apr 20, 2010
- Brion Technologies, Inc.
- Peng Liu
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Lithography Simulation
- Publication number 20120269421
- Publication date Oct 25, 2012
- ASML NETHERLANDS B.V.
- Jun Ye
- G06 - COMPUTING CALCULATING COUNTING