Lutz Eckart

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Technique for removing resist material after high dose implantation...
- Patent number 7,816,273
- Issue date Oct 19, 2010
- Advanced Micro Devices, Inc.
- Christian Krueger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUE FOR REMOVING RESIST MATERIAL AFTER HIGH DOSE IMPLANTATION...
- Publication number 20080160729
- Publication date Jul 3, 2008
- Christian Krueger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY