Lutz Rebstock

Person

Haienhofen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection system
- Patent number 12,087,603
- Issue date Sep 10, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic handling buffer for bare stocker
- Patent number 11,978,652
- Issue date May 7, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning a synthetic surface
- Patent number 11,872,603
- Issue date Jan 16, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Container storage add-on for bare workpiece stocker
- Patent number 11,587,816
- Issue date Feb 21, 2023
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic handling buffer for bare stocker
- Patent number 11,515,189
- Issue date Nov 29, 2022
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated handling system for semiconductor articles
- Patent number 11,443,962
- Issue date Sep 13, 2022
- BROOKS AUTOMATION US, LLC
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Cleaning systems and methods for semiconductor substrate storage ar...
- Patent number 11,167,322
- Issue date Nov 9, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Reticle compartment and diffusor plate
- Patent number 11,171,024
- Issue date Nov 9, 2021
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 11,152,203
- Issue date Oct 19, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor stocker systems and methods
- Patent number 11,107,715
- Issue date Aug 31, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Container storage add-on for bare workpiece stocker
- Patent number 11,049,750
- Issue date Jun 29, 2021
- BROOKS CCS GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot with gas flow sensor coupled to robot arm
- Patent number 11,024,526
- Issue date Jun 1, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Workpiece stocker with circular configuration
- Patent number 10,930,536
- Issue date Feb 23, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 10,892,155
- Issue date Jan 12, 2021
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor stocker systems and methods
- Patent number 10,872,796
- Issue date Dec 22, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stackable substrate carriers
- Patent number 10,770,323
- Issue date Sep 8, 2020
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic handling buffer for bare stocker
- Patent number 10,741,431
- Issue date Aug 11, 2020
- Brooks Automation, Inc.
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle compartment and diffusor plate
- Patent number 10,727,098
- Issue date Jul 28, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier having drip edge configurations
- Patent number 10,665,486
- Issue date May 26, 2020
- BROOKS CCS, GmbH
- Lutz Rebstock
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Removable compartments for workpiece stocker
- Patent number 10,643,878
- Issue date May 5, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 10,593,576
- Issue date Mar 17, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Container storage add-on for bare workpiece stocker
- Patent number 10,529,609
- Issue date Jan 7, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor stocker systems and methods
- Patent number 10,453,722
- Issue date Oct 22, 2019
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 10,096,461
- Issue date Oct 9, 2018
- Brooks Automation Germany, GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor stocker systems and methods
- Patent number 10,090,179
- Issue date Oct 2, 2018
- Brooks Automation, Inc.
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning systems and methods for semiconductor substrate storage ar...
- Patent number 10,065,222
- Issue date Sep 4, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 10,043,651
- Issue date Aug 7, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 10,026,604
- Issue date Jul 17, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Workpiece stocker with circular configuration
- Patent number 9,947,565
- Issue date Apr 17, 2018
- Brooks Automation, Inc.
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer station for stocker system
- Patent number 9,919,871
- Issue date Mar 20, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION SYSTEM
- Publication number 20250006527
- Publication date Jan 2, 2025
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20240226969
- Publication date Jul 11, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- B08 - CLEANING
Information Patent Application
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
- Publication number 20240006210
- Publication date Jan 4, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230418169
- Publication date Dec 28, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
- Publication number 20230170240
- Publication date Jun 1, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...
- Publication number 20230135865
- Publication date May 4, 2023
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
Integrated handling system for semiconductor articles
- Publication number 20230085278
- Publication date Mar 16, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20230062287
- Publication date Mar 2, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CORE MODULE FOR SEMICONDUCTOR PRODUCTION FACILITY MACHINERY
- Publication number 20230017221
- Publication date Jan 19, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230011873
- Publication date Jan 12, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER
- Publication number 20210398836
- Publication date Dec 23, 2021
- Brooks CCS GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
- Publication number 20210057255
- Publication date Feb 25, 2021
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM
- Publication number 20210050237
- Publication date Feb 18, 2021
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RETICLE COMPARTMENT AND DIFFUSOR PLATE
- Publication number 20200357673
- Publication date Nov 12, 2020
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER
- Publication number 20200126833
- Publication date Apr 23, 2020
- Brooks CCS GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20200051845
- Publication date Feb 13, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20200043766
- Publication date Feb 6, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
RETICLE COMPARTMENT AND DIFFUSOR PLATE
- Publication number 20190189483
- Publication date Jun 20, 2019
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20190148133
- Publication date May 16, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20190139803
- Publication date May 9, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION
- Publication number 20190019709
- Publication date Jan 17, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...
- Publication number 20180369885
- Publication date Dec 27, 2018
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20180350589
- Publication date Dec 6, 2018
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20180330940
- Publication date Nov 15, 2018
- Brooks Automation GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
HUMIDITY CONTROL IN SEMICONDUCTOR SYSTEMS
- Publication number 20180286726
- Publication date Oct 4, 2018
- Brooks CCS GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection System
- Publication number 20180040494
- Publication date Feb 8, 2018
- Lutz Rebstock
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
- Publication number 20170338139
- Publication date Nov 23, 2017
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20170162413
- Publication date Jun 8, 2017
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20170025288
- Publication date Jan 26, 2017
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
Cleaning Systems and Methods for Semiconductor Substrate Storage Ar...
- Publication number 20160303622
- Publication date Oct 20, 2016
- Brooks CCS GmbH
- Lutz Rebstock
- B08 - CLEANING

Lutz Rebstock

Person

Patents Grantslast 30 patents

Inspection system

Automatic handling buffer for bare stocker

Method for cleaning a synthetic surface

Container storage add-on for bare workpiece stocker

Automatic handling buffer for bare stocker

Integrated handling system for semiconductor articles

Cleaning systems and methods for semiconductor substrate storage ar...

Reticle compartment and diffusor plate

Semiconductor cleaner systems and methods

Semiconductor stocker systems and methods

Container storage add-on for bare workpiece stocker

Robot with gas flow sensor coupled to robot arm

Workpiece stocker with circular configuration

Semiconductor cleaner systems and methods

Semiconductor stocker systems and methods

Stackable substrate carriers

Automatic handling buffer for bare stocker

Reticle compartment and diffusor plate

Substrate carrier having drip edge configurations

Removable compartments for workpiece stocker

Inspection system

Container storage add-on for bare workpiece stocker

Semiconductor stocker systems and methods

Semiconductor cleaner systems and methods

Semiconductor stocker systems and methods

Cleaning systems and methods for semiconductor substrate storage ar...

Semiconductor cleaner systems and methods

Semiconductor cleaner systems and methods

Workpiece stocker with circular configuration

Buffer station for stocker system

Patents Applicationslast 30 patents

INSPECTION SYSTEM

METHOD FOR CLEANING A SYNTHETIC SURFACE

METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...

Integrated handling system for semiconductor articles

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

CORE MODULE FOR SEMICONDUCTOR PRODUCTION FACILITY MACHINERY

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

INSPECTION SYSTEM

RETICLE COMPARTMENT AND DIFFUSOR PLATE

CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

METHOD FOR CLEANING A SYNTHETIC SURFACE

RETICLE COMPARTMENT AND DIFFUSOR PLATE

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION

CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

HUMIDITY CONTROL IN SEMICONDUCTOR SYSTEMS

Inspection System

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

Cleaning Systems and Methods for Semiconductor Substrate Storage Ar...