Lydia J. Young

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gas injection system for semiconductor processing
- Patent number 5,851,294
- Issue date Dec 22, 1998
- Watkins Johnson Company
- Lydia J. Young
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...