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M. Grant Albrecht
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McKinney, TX, US
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last 30 patents
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Patent Grant
Hydrogen-less CVD TiN process for FeRAM VIA0 barrier application
Patent number
6,998,275
Issue date
Feb 14, 2006
Texas Instruments Incorporated
Jin Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Hydrogen-less CVD TiN process for FeRAM VIA0 barrier application
Publication number
20040203176
Publication date
Oct 14, 2004
Jin Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...