M. J. Francois Chandrasekar Dassapa

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for determining an etch endpoint in a plasma...
- Patent number 6,562,187
- Issue date May 13, 2003
- Lam Research Corporation
- Jaroslaw W. Winniczek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for determining an etch endpoint in a plasma...
- Patent number 6,228,278
- Issue date May 8, 2001
- Lam Research Corporation
- Jaroslaw W. Winniczek
- H01 - BASIC ELECTRIC ELEMENTS