M. Ziaul Karim

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for coating removal
- Patent number 12,138,745
- Issue date Nov 12, 2024
- YIELD ENGINEERING SYSTEMS, INC.
- M Ziaul Karim
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated ultrasonics and megasonics cleaning
- Patent number 12,042,827
- Issue date Jul 23, 2024
- YIELD ENGINEERING SYSTEMS, INC.
- Louis Navarro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
- Patent number 11,942,365
- Issue date Mar 26, 2024
- Eugenus, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using processing oven
- Patent number 11,850,672
- Issue date Dec 26, 2023
- YIELD ENGINEERING SYSTEMS, INC.
- Lei Jing
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of using processing oven
- Patent number 11,465,225
- Issue date Oct 11, 2022
- YIELD ENGINEERING SYSTEMS, INC.
- Lei Jing
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of using a processing oven
- Patent number 11,456,274
- Issue date Sep 27, 2022
- YIELD ENGINEERING SYSTEMS, INC.
- M Ziaul Karim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Batch processing oven and method
- Patent number 11,444,053
- Issue date Sep 13, 2022
- YIELD ENGINEERING SYSTEMS, INC.
- M Ziaul Karim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
TiSiN coating method
- Patent number 11,401,607
- Issue date Aug 2, 2022
- Eugenus, Inc.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solder reflow oven for batch processing
- Patent number 11,335,662
- Issue date May 17, 2022
- YIELD ENGINEERING SYSTEMS, INC.
- M Ziaul Karim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for surface preparation prior to epitaxial dep...
- Patent number 10,544,519
- Issue date Jan 28, 2020
- Aixtron SE
- Stephen Edward Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods of providing uniform gas delivery to a reactor
- Patent number 7,981,472
- Issue date Jul 19, 2011
- Aixtron, Inc.
- Jeremie J. Dalton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen assisted HDP-CVD deposition process for aggressive gap-fil...
- Patent number 7,595,088
- Issue date Sep 29, 2009
- Applied Materials, Inc.
- Bikram Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ-etch-assisted HDP deposition
- Patent number 7,294,588
- Issue date Nov 13, 2007
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD multistep gapfill process
- Patent number 7,205,240
- Issue date Apr 17, 2007
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Applications and methods of making nitrogen-free anti-reflective la...
- Patent number 7,052,988
- Issue date May 30, 2006
- Novellus Systems, Inc.
- Bart van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ-etch-assisted HDP deposition using SiF4
- Patent number 7,049,211
- Issue date May 23, 2006
- Applied Materials
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gap filling with a composite layer
- Patent number 7,033,945
- Issue date Apr 25, 2006
- Applied Materials
- Jeong Soo Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for high-aspect-ratio gapfill using atomic-oxyg...
- Patent number 6,958,112
- Issue date Oct 25, 2005
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ-etch-assisted HDP deposition using SiF4 and hydrogen
- Patent number 6,903,031
- Issue date Jun 7, 2005
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low dielectric constant fluorine-doped silica glass film for use in...
- Patent number 6,844,612
- Issue date Jan 18, 2005
- Novellus Systems, Inc.
- Jason Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen assisted HDP-CVD deposition process for aggressive gap-fil...
- Patent number 6,808,748
- Issue date Oct 26, 2004
- Applied Materials, Inc.
- Bikram Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Applications and methods of making nitrogen-free anti-reflective la...
- Patent number 6,720,251
- Issue date Apr 13, 2004
- Novellus Systems, Inc.
- Bart van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low dielectric constant etch stop films
- Patent number 6,417,092
- Issue date Jul 9, 2002
- Novellus Systems, Inc.
- Sanjeev Jain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to improve chemical vapor deposited fluorosilicate glass (F...
- Patent number 6,303,518
- Issue date Oct 16, 2001
- Novellus Systems, Inc.
- Jason L. Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR COATING REMOVAL
- Publication number 20240316727
- Publication date Sep 26, 2024
- Yield Engineering Systems, Inc.
- M Ziaul Karim
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF USING PROCESSING OVEN
- Publication number 20240066618
- Publication date Feb 29, 2024
- Yield Engineering Systems, Inc.
- Lei Jing
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESS CHAMBER WITH UV IRRADIANCE
- Publication number 20230294190
- Publication date Sep 21, 2023
- Yield Engineering Systems, Inc.
- Tapani Laaksonen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TISIN COATING METHOD
- Publication number 20230151488
- Publication date May 18, 2023
- EUGENUS, INC.
- Vinayak Veer VATS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL
- Publication number 20230117184
- Publication date Apr 20, 2023
- Yield Engineering Systems, Inc.
- M. Ziaul Karim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING PROCESSING OVEN
- Publication number 20230060603
- Publication date Mar 2, 2023
- Yield Engineering Systems, Inc.
- Lei Jing
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SOLDER REFLOW OVEN FOR BATCH PROCESSING
- Publication number 20210398937
- Publication date Dec 23, 2021
- Yield Engineering Systems, Inc.
- M Ziaul Karim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BATCH PROCESSING OVEN AND METHOD
- Publication number 20210265301
- Publication date Aug 26, 2021
- Yield Engineering Systems, Inc.
- M Ziaul Karim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR SURFACE PREPARATION PRIOR TO EPITAXIAL DEP...
- Publication number 20190062947
- Publication date Feb 28, 2019
- AIXTRON SE
- Stephen Edward Savas
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...
- Publication number 20180350657
- Publication date Dec 6, 2018
- EUGENUS, INC.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TiSiN Coating Method
- Publication number 20180347040
- Publication date Dec 6, 2018
- EUGENUS, INC.
- Vinayak Veer VATS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO A REACTOR
- Publication number 20110253046
- Publication date Oct 20, 2011
- Jeremie J. Dalton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO A REACTOR
- Publication number 20090324829
- Publication date Dec 31, 2009
- Jeremie J. Dalton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS
- Publication number 20080072821
- Publication date Mar 27, 2008
- Jeremic J. Dalton
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO A REACTOR
- Publication number 20070234956
- Publication date Oct 11, 2007
- Jeremie J. Dalton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer for atomic layer deposition system
- Publication number 20070042119
- Publication date Feb 22, 2007
- Larry Matthysse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-situ-etch-assisted HDP deposition
- Publication number 20060166515
- Publication date Jul 27, 2006
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gap filling with a composite layer
- Publication number 20050277257
- Publication date Dec 15, 2005
- Applied Materials, Inc.
- Jeong Soo Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-situ-etch-assisted HDP deposition using SiF4
- Publication number 20050164517
- Publication date Jul 28, 2005
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gap-fill techniques
- Publication number 20050136684
- Publication date Jun 23, 2005
- Applied Materials, Inc.
- Kevin Mikio Mukai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-situ-etch-assisted HDP deposition using SiF4 and hydrogen
- Publication number 20050048801
- Publication date Mar 3, 2005
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrogen assisted HDP-CVD deposition process for aggressive gap-fil...
- Publication number 20050008790
- Publication date Jan 13, 2005
- Applied Materials, Inc.
- Bikram Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HDP-CVD MULTISTEP GAPFILL PROCESS
- Publication number 20040245091
- Publication date Dec 9, 2004
- Applied Materials, Inc.
- M Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and systems for high-aspect-ratio gapfill using atomic-oxyg...
- Publication number 20040241342
- Publication date Dec 2, 2004
- Applied Materials, Inc.
- M. Ziaul Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low dielectric constant etch stop films
- Publication number 20030036280
- Publication date Feb 20, 2003
- Novellus System, Inc.
- Sanjeev Jain
- H01 - BASIC ELECTRIC ELEMENTS

M. Ziaul Karim

Person

Patents Grantslast 30 patents

Apparatus and method for coating removal

Integrated ultrasonics and megasonics cleaning

Multi-region diffusion barrier containing titanium, silicon and nit...

Method of using processing oven

Method of using processing oven

Method of using a processing oven

Batch processing oven and method

TiSiN coating method

Solder reflow oven for batch processing

Method and apparatus for surface preparation prior to epitaxial dep...

Methods of providing uniform gas delivery to a reactor

Hydrogen assisted HDP-CVD deposition process for aggressive gap-fil...

In-situ-etch-assisted HDP deposition

HDP-CVD multistep gapfill process

Applications and methods of making nitrogen-free anti-reflective la...

In-situ-etch-assisted HDP deposition using SiF4

Gap filling with a composite layer

Methods and systems for high-aspect-ratio gapfill using atomic-oxyg...

In-situ-etch-assisted HDP deposition using SiF4 and hydrogen

Low dielectric constant fluorine-doped silica glass film for use in...

Hydrogen assisted HDP-CVD deposition process for aggressive gap-fil...

Applications and methods of making nitrogen-free anti-reflective la...

Low dielectric constant etch stop films

Methods to improve chemical vapor deposited fluorosilicate glass (F...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR COATING REMOVAL

METHOD OF USING PROCESSING OVEN

PROCESS CHAMBER WITH UV IRRADIANCE

TISIN COATING METHOD

BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL

METHOD OF USING PROCESSING OVEN

SOLDER REFLOW OVEN FOR BATCH PROCESSING

BATCH PROCESSING OVEN AND METHOD

METHOD AND APPARATUS FOR SURFACE PREPARATION PRIOR TO EPITAXIAL DEP...

MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...

TiSiN Coating Method

APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO A REACTOR

METHOD AND APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO A REACTOR

SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS

METHOD AND APPARATUS FOR PROVIDING UNIFORM GAS DELIVERY TO A REACTOR

Vaporizer for atomic layer deposition system

In-situ-etch-assisted HDP deposition

Gap filling with a composite layer

In-situ-etch-assisted HDP deposition using SiF4

Gap-fill techniques

In-situ-etch-assisted HDP deposition using SiF4 and hydrogen

Hydrogen assisted HDP-CVD deposition process for aggressive gap-fil...

HDP-CVD MULTISTEP GAPFILL PROCESS

Methods and systems for high-aspect-ratio gapfill using atomic-oxyg...

Low dielectric constant etch stop films