Maarten Hoogerland

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Auckland, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,961,116
- Issue date Nov 1, 2005
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC