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Maarten Hoogerland
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Auckland, NZ
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last 30 patents
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Patent Grant
Alignment system and method
Patent number
7,564,534
Issue date
Jul 21, 2009
ASML Netherlands B.V.
Arie Jeffrey Den Boef
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Alignment system and method
Patent number
7,319,506
Issue date
Jan 15, 2008
ASML Netherlands B.V.
Arie Jeffrey Den Boef
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Alignment system and method
Publication number
20080088956
Publication date
Apr 17, 2008
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Alignment system and method
Publication number
20060007446
Publication date
Jan 12, 2006
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20040033426
Publication date
Feb 19, 2004
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY