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Machi Moriya
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of manufacturing semiconductor device and system for manufac...
Patent number
8,853,087
Issue date
Oct 7, 2014
Tokyo Electron Limited
Keisuke Tanaka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Processing method and processing system
Patent number
8,778,205
Issue date
Jul 15, 2014
Tokyo Electron Limited
Tsuyoshi Ohno
G01 - MEASURING TESTING
Information
Patent Grant
Roughness evaluation method and system
Patent number
7,733,502
Issue date
Jun 8, 2010
Tokyo Electron Limited
Tsuyoshi Moriya
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SYSTEM FOR MANUFAC...
Publication number
20120282713
Publication date
Nov 8, 2012
TOKYO ELECTRON LIMITED
Keisuke Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Processing method and processing system
Publication number
20100133231
Publication date
Jun 3, 2010
TOKYO ELECTRON LIMITED
Tsuyoshi Ohno
G01 - MEASURING TESTING
Information
Patent Application
ROUGHNESS EVALUATION METHOD AND SYSTEM
Publication number
20080165367
Publication date
Jul 10, 2008
TOKYO ELECTRON LIMITED
Tsuyoshi MORIYA
G01 - MEASURING TESTING
Information
Patent Application
Processing method and processing system
Publication number
20040260420
Publication date
Dec 23, 2004
TOKYO ELECTRON LIMITED
Tsuyoshi Ohno
G01 - MEASURING TESTING