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Machiko Obi
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Nirasaki-Shi, JP
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last 30 patents
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Patent Application
Method of plasma etching
Publication number
20050101140
Publication date
May 12, 2005
TOKYO ELECTRON LIMITED
Tomoyo Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Etching method
Publication number
20030153193
Publication date
Aug 14, 2003
Takashi Fuse
H01 - BASIC ELECTRIC ELEMENTS