TREA

Machiko Obi

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  • Nirasaki-Shi, JP
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Patents Applicationslast 30 patents

  • Information Patent Application

    Method of plasma etching
    • Publication number 20050101140
    • Publication date May 12, 2005
    • TOKYO ELECTRON LIMITED
    • Tomoyo Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching method
    • Publication number 20030153193
    • Publication date Aug 14, 2003
    • Takashi Fuse
    • H01 - BASIC ELECTRIC ELEMENTS