Madhavi Chandrahood

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Sunnyvale, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR IN-SITU CHAMBER DRY CLEAN IN PHOTOMASK PLASMA ETCHING P...
- Publication number 20130048606
- Publication date Feb 28, 2013
- Zhigang Mao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR IN-SITU CHAMBER DRY CLEAN DURING PHOTOMAS...
- Publication number 20090325387
- Publication date Dec 31, 2009
- APPLIED MATERIALS, INC.
- Xiaoyi Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY