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Madhu Santosh Kumar MUTYALA

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  • Santa Clara, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Shaped showerhead for edge plasma modulation
    • Patent number 12,338,530
    • Issue date Jun 24, 2025
    • Applied Materials, Inc.
    • Saketh Pemmasani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Low impedance current path for edge non-uniformity tuning
    • Patent number 11,929,278
    • Issue date Mar 12, 2024
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Mesa height modulation for thickness correction
    • Patent number 11,869,795
    • Issue date Jan 9, 2024
    • Applied Materials, Inc.
    • Saketh Pemmasani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods for pressure ramped plasma purge
    • Patent number 11,817,313
    • Issue date Nov 14, 2023
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi channel splitter spool
    • Patent number 11,600,468
    • Issue date Mar 7, 2023
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Initiation modulation for plasma deposition
    • Patent number 11,430,654
    • Issue date Aug 30, 2022
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi zone electrostatic chuck
    • Patent number 11,270,903
    • Issue date Mar 8, 2022
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ENHANCED DEUTERIUM MIGRATION
    • Publication number 20250226203
    • Publication date Jul 10, 2025
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHAPED SHOWERHEAD FOR EDGE PLASMA MODULATION
    • Publication number 20230011938
    • Publication date Jan 12, 2023
    • Applied Materials, Inc.
    • Saketh Pemmasani
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MESA HEIGHT MODULATION FOR THICKNESS CORRECTION
    • Publication number 20230008922
    • Publication date Jan 12, 2023
    • Applied Materials, Inc.
    • Saketh Pemmasani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOW IMPEDANCE CURRENT PATH FOR EDGE NON-UNIFORMITY TUNING
    • Publication number 20220375776
    • Publication date Nov 24, 2022
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ISOLATOR FOR PROCESSING CHAMBERS
    • Publication number 20220328293
    • Publication date Oct 13, 2022
    • Applied Materials, Inc.
    • Akshay Dhanakshirur
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SILICON OXIDE GAP FILL USING CAPACITIVELY COUPLED PLASMAS
    • Publication number 20220157602
    • Publication date May 19, 2022
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF REDUCING DEFECTS IN A MULTI-LAYER PECVD TEOS OXIDE FILM
    • Publication number 20220119952
    • Publication date Apr 21, 2022
    • Applied Materials, Inc.
    • Rana Howlader
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTRIC ARC MITIGATING FACEPLATE
    • Publication number 20220122811
    • Publication date Apr 21, 2022
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER NON-UNIFORMITY TWEAKING THROUGH LOCALIZED ION ENHANCED PLASMA...
    • Publication number 20220093368
    • Publication date Mar 24, 2022
    • Applied Materials, Inc.
    • Saketh Pemmasani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR PRESSURE RAMPED PLASMA PURGE
    • Publication number 20210242016
    • Publication date Aug 5, 2021
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI ZONE ELECTROSTATIC CHUCK
    • Publication number 20210183678
    • Publication date Jun 17, 2021
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    INITIATION MODULATION FOR PLASMA DEPOSITION
    • Publication number 20210159073
    • Publication date May 27, 2021
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE ENCASING MATERIAL LAYER
    • Publication number 20210134592
    • Publication date May 6, 2021
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REPULSION MESH AND DEPOSITION METHODS
    • Publication number 20210082732
    • Publication date Mar 18, 2021
    • Applied Materials, Inc.
    • Madhu Santosh Kumar Mutyala
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI CHANNEL SPLITTER SPOOL
    • Publication number 20200251310
    • Publication date Aug 6, 2020
    • Applied Materials, Inc.
    • Madhu Santosh Kumar MUTYALA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR