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Madoka FUJIMOTO
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Koshi-shi, JP
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20190189475
Publication date
Jun 20, 2019
TOKYO ELECTRON LIMITED
Madoka Fujimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ELECTRODE AND PLASMA PROCESSING DEVICE
Publication number
20190108984
Publication date
Apr 11, 2019
TOKYO ELECTRON LIMITED
Masato MORISHIMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
Publication number
20180135161
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Madoka FUJIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...