Mahesh K. Sanganeria

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Protection of Cu damascene interconnects by formation of a self-ali...
- Patent number 8,030,777
- Issue date Oct 4, 2011
- Novellus Systems, Inc.
- Bart van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving adhesion between two dielectric films
- Patent number 7,705,431
- Issue date Apr 27, 2010
- Novellius Systems, Inc.
- Mahesh Sanganeria
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving adhesion between two dielectric films
- Patent number 7,622,380
- Issue date Nov 24, 2009
- Novellus Systems, Inc.
- Mahesh Sanganeria
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protection of Cu damascene interconnects by formation of a self-ali...
- Patent number 7,396,759
- Issue date Jul 8, 2008
- Novellus Systems, Inc.
- Bart van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving adhesion between two dielectric films
- Patent number 6,972,252
- Issue date Dec 6, 2005
- Novellus Systems, Inc.
- Mahesh Sanganeria
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling FSG deposition rate in an HDP reactor
- Patent number 6,403,501
- Issue date Jun 11, 2002
- Novellus Systems, Inc.
- Jonathan W. Hander
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor hold-down mechanism
- Patent number 6,118,100
- Issue date Sep 12, 2000
- Mattson Technology, Inc.
- Robert D. Mailho
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gas injection system for CVD reactors
- Patent number 6,113,984
- Issue date Sep 5, 2000
- Concept Systems Design, Inc.
- Joseph H. MacLeish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of cleaning wafer substrates
- Patent number 5,968,279
- Issue date Oct 19, 1999
- Mattson Technology, Inc.
- Joseph H. MacLeish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for making integrated circuit structure comprising local ar...
- Patent number 5,895,261
- Issue date Apr 20, 1999
- LSI Logic Corporation
- Richard Schinella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for making integrated circuit structure comprising local ar...
- Patent number 5,670,425
- Issue date Sep 23, 1997
- LSI Logic Corporation
- Richard Schinella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection system for CVD reactors
- Patent number 5,653,808
- Issue date Aug 5, 1997
- Joseph H. MacLeish
- C30 - CRYSTAL GROWTH

Mahesh K. Sanganeria

Person

Patents Grantslast 30 patents

Protection of Cu damascene interconnects by formation of a self-ali...

Method of improving adhesion between two dielectric films

Method of improving adhesion between two dielectric films

Protection of Cu damascene interconnects by formation of a self-ali...

Method of improving adhesion between two dielectric films

Method of controlling FSG deposition rate in an HDP reactor

Susceptor hold-down mechanism

Gas injection system for CVD reactors

Method of cleaning wafer substrates

Process for making integrated circuit structure comprising local ar...

Process for making integrated circuit structure comprising local ar...

Gas injection system for CVD reactors