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MAHMOUD DAHIMENE
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GAITHERSBURG, MD, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for providing uniform plasma in a magnetic fie...
Patent number
7,374,636
Issue date
May 20, 2008
Applied Materials, Inc.
Keiji Horioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for uniformly etching a dielectric layer
Patent number
7,316,761
Issue date
Jan 8, 2008
Applied Materials, Inc.
Kenny L. Doan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for modifying dielectric characteristics of dielectric layers
Patent number
6,921,727
Issue date
Jul 26, 2005
Applied Materials, Inc.
Kang-Lie Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of photoresist ash residue removal
Patent number
6,734,120
Issue date
May 11, 2004
Axcelis Technologies, Inc.
Ivan Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxygen free plasma stripping process
Patent number
6,638,875
Issue date
Oct 28, 2003
Axcelis Technologies, Inc.
Qingyan Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of stripping photoresist using re-coating material
Patent number
6,406,836
Issue date
Jun 18, 2002
Axcelis Technologies, Inc.
Robert Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate support for plasma processing
Patent number
6,273,958
Issue date
Aug 14, 2001
Applied Materials, Inc.
Shamouil Shamouilian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for supplying a chucking voltage to an electro...
Patent number
6,198,616
Issue date
Mar 6, 2001
Applied Materials, Inc.
Mahmoud Dahimene
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
DC power supply
Patent number
6,005,376
Issue date
Dec 21, 1999
Applied Materials, Inc.
Richard R. Mett
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for actively controlling the DC potential of a...
Patent number
5,737,177
Issue date
Apr 7, 1998
Applied Materials, Inc.
Richard Raymond Mett
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA CHAMBER INSERT RING
Publication number
20060283553
Publication date
Dec 21, 2006
Applied Materials, Inc.
Shawming Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for modifying dielectric characteristics of dielectric layers
Publication number
20040180556
Publication date
Sep 16, 2004
APPLIED MATERIALS, INC.
Kang-Lie Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for uniformly etching a dielectric layer
Publication number
20040149394
Publication date
Aug 5, 2004
APPLIED MATERIALS, INC.
Kenny L. Doan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma chamber insert ring
Publication number
20030106646
Publication date
Jun 12, 2003
APPLIED MATERIALS, INC.
Shawming Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for providing uniform plasma in a magnetic fie...
Publication number
20030006008
Publication date
Jan 9, 2003
APPLIED MATERIALS, INC.
Keiji Horioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Capacitively coupled reactive ion etch plasma reactor with overhead...
Publication number
20020101167
Publication date
Aug 1, 2002
APPLIED MATERIALS, INC.
Hongqing Shan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Oxygen free plasma stripping process
Publication number
20010027016
Publication date
Oct 4, 2001
Axcelis Technologies, Inc.
Qingyan Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT FOR PLASMA PROCESSING
Publication number
20010003298
Publication date
Jun 14, 2001
SHAMOUIL SHAMOUILIAN
H01 - BASIC ELECTRIC ELEMENTS