Mai YAMAKAWA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 9,355,872
- Issue date May 31, 2016
- SCREEN Holdings Co., Ltd.
- Takayoshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle, substrate processing apparatus, and substrate processing me...
- Patent number 8,888,925
- Issue date Nov 18, 2014
- SCREEN Holdings Co., Ltd.
- Masanobu Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
NOZZLE, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150053244
- Publication date Feb 26, 2015
- SCREEN Holdings Co., Ltd.
- Masanobu SATO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20120247506
- Publication date Oct 4, 2012
- Takayoshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING ME...
- Publication number 20120222707
- Publication date Sep 6, 2012
- Masanobu SATO
- B08 - CLEANING