Maikel Adrianus Cornelis Schepers

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Nuenen, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and a device manufacturing method involving...
- Patent number 9,618,835
- Issue date Apr 11, 2017
- ASML Netherlands B.V.
- Daniel Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation conduit for radiation source
- Patent number 8,680,493
- Issue date Mar 25, 2014
- ASML Netherlands B.V.
- Maikel Adrianus Cornelis Schepers
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fluid handling structure, lithographic apparatus and a device manuf...
- Patent number 8,638,417
- Issue date Jan 28, 2014
- ASML Netherlands B.V.
- Danny Maria Hubertus Philips
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 8,421,993
- Issue date Apr 16, 2013
- ASML Netherlands B.V.
- Daniel Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 8,405,815
- Issue date Mar 26, 2013
- ASML Netherlands B.V.
- Danny Maria Hubertus Philips
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC