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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,019,476
Issue date
Apr 28, 2015
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,978,308
Issue date
Jul 12, 2011
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110222045
Publication date
Sep 15, 2011
ASML NETHERLANDS B.V.
Rene Theodorus Petrus COMPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY