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Maki Kimura
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Tokyo, JP
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last 30 patents
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Patent Grant
Pattern evaluation method and pattern evaluation device
Patent number
9,488,815
Issue date
Nov 8, 2016
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PROCESSOR SYSTEM, SEMICONDUCTOR INSPECTION SYSTEM, AND PROGRAM
Publication number
20230230886
Publication date
Jul 20, 2023
HITACHI HIGH-TECH CORPORATION
Kenji YASUI
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
Charged Particle Microscope System and Measurement Method Using Same
Publication number
20150235804
Publication date
Aug 20, 2015
Hitachi High-Technologies Corporation
Mayuka Osaki
G02 - OPTICS
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Patent Application
PATTERN EVALUATION METHOD AND PATTERN EVALUATION DEVICE
Publication number
20140320627
Publication date
Oct 30, 2014
Atsushi Miyamoto
G02 - OPTICS