Maki Nakamura

Follow

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Process for producing various gases for semiconductor production fa...
- Patent number 5,656,557
- Issue date Aug 12, 1997
- Nippon Sanso Corporation
- Yuichi Hata
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...