Makio Higashi

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate collection method and substrate treatment apparatus
- Patent number 7,840,299
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Makio Higashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,383,093
- Issue date Jun 3, 2008
- Tokyo Electron Limited
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, coating/developing apparatus, and subs...
- Patent number 7,379,785
- Issue date May 27, 2008
- Tokyo Electron Limited
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus
- Patent number 7,210,864
- Issue date May 1, 2007
- Tokyo Electron Limited
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,191,033
- Issue date Mar 13, 2007
- Tokyo Electron Limited
- Makio Higashi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing apparatus and substrate transferring method
- Patent number 6,981,808
- Issue date Jan 3, 2006
- Tokyo Electron Limited
- Akira Miyata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus, substrate processing method, and co...
- Publication number 20090149982
- Publication date Jun 11, 2009
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Collection Method and Substrate Treatment Apparatus
- Publication number 20080020315
- Publication date Jan 24, 2008
- TOKYO ELECTRON LIMITED
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20070016320
- Publication date Jan 18, 2007
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, substrate processing method, and co...
- Publication number 20060011296
- Publication date Jan 19, 2006
- TOKYO ELECTRON LIMITED
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer processing system, coating/developing apparatus, and wafer, p...
- Publication number 20050287821
- Publication date Dec 29, 2005
- Makio Higashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating and developing apparatus
- Publication number 20050217581
- Publication date Oct 6, 2005
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050197729
- Publication date Sep 8, 2005
- Makio Higashi
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus and substrate transferring method
- Publication number 20030147643
- Publication date Aug 7, 2003
- TOKYO ELECTRON LIMITED
- Akira Miyata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Makio Higashi

Person

Patents Grantslast 30 patents

Substrate collection method and substrate treatment apparatus

Substrate processing apparatus and substrate processing method

Substrate processing system, coating/developing apparatus, and subs...

Coating and developing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate transferring method

Patents Applicationslast 30 patents

Substrate processing apparatus, substrate processing method, and co...

Substrate Collection Method and Substrate Treatment Apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate processing method, and co...

Wafer processing system, coating/developing apparatus, and wafer, p...

Coating and developing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate transferring method