Makoto Aida

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Patents Grantslast 30 patents

Information Patent Grant
Heating processing apparatus and heating processing method
- Patent number 11,127,611
- Issue date Sep 21, 2021
- TOSHIBA MEMORY CORPORATION
- Makoto Aida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pattern forming method
- Patent number 9,437,477
- Issue date Sep 6, 2016
- Kabushiki Kaisha Toshiba
- Makoto Aida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
HEATING PROCESSING APPARATUS AND HEATING PROCESSING METHOD
- Publication number 20200075365
- Publication date Mar 5, 2020
- Toshiba Memory Corporation
- Makoto AIDA
- G05 - CONTROLLING REGULATING
Information Patent Application
CHEMICAL LIQUID SUPPLY SYSTEM AND CHEMICAL LIQUID SUPPLY METHOD
- Publication number 20170340995
- Publication date Nov 30, 2017
- Toshiba Memory Corporation
- Makoto AIDA
- B08 - CLEANING