Makoto Akita

Person

  • Hsin-Chu, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    COMPOUND AND CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION

    • Publication number 20100233628
    • Publication date Sep 16, 2010
    • Sumitomo Chemical Company, Limited
    • Makoto AKITA
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
  • Information Patent Application

    CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION

    • Publication number 20090004600
    • Publication date Jan 1, 2009
    • Sumitomo Chemical Company, Limited
    • Makoto Akita
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
  • Information Patent Application

    Chemically amplified positive resist composition

    • Publication number 20090004601
    • Publication date Jan 1, 2009
    • Sumitomo Chemical Company, Limited
    • Makoto Akita
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION

    • Publication number 20080286691
    • Publication date Nov 20, 2008
    • Sumitomo Chemical Company, Limited
    • Makoto AKITA
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
  • Information Patent Application

    Chemically amplified positive resist compostion

    • Publication number 20080153036
    • Publication date Jun 26, 2008
    • Sumitomo Chemical Company, Limited
    • Masumi Suetsugu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY