Makoto Ando

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma device and plasma generating method
- Patent number 7,243,610
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slot array antenna and plasma processing apparatus
- Patent number 7,023,393
- Issue date Apr 4, 2006
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma device and plasma generating method
- Patent number 6,967,622
- Issue date Nov 22, 2005
- Tokyo Electron Limited
- Nobuo Ishii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma device and plasma generating method
- Patent number 6,911,617
- Issue date Jun 28, 2005
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-assisted processing system and plasma-assisted processing me...
- Patent number 6,646,224
- Issue date Nov 11, 2003
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,528,752
- Issue date Mar 4, 2003
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,347,602
- Issue date Feb 19, 2002
- Tokyo Electron Limited
- Naohisa Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment system
- Patent number 6,322,662
- Issue date Nov 27, 2001
- Tokyo Electron Limited
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and apparatus
- Patent number 6,311,638
- Issue date Nov 6, 2001
- Tokyo Electron Limited
- Nobuo Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,698,036
- Issue date Dec 16, 1997
- Tokyo Electron Limited
- Nobuo Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polarization-universal radial line slot antenna
- Patent number 5,661,498
- Issue date Aug 26, 1997
- Toppan Printing Co., Ltd.
- Naohisa Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slotted leaky waveguide array antenna
- Patent number 5,579,019
- Issue date Nov 26, 1996
- Nippon Steel Corporation
- Masahiro Uematsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flat circular unidirectional microwave antenna
- Patent number 4,819,003
- Issue date Apr 4, 1989
- Naohisa Goto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Slot array antenna and plasma processing apparatus
- Publication number 20060158381
- Publication date Jul 20, 2006
- TOKYO ELECTRON LIMITED
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing device and plasma generating method
- Publication number 20060005929
- Publication date Jan 12, 2006
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electromagnetic field supply apparatus and plasma processing device
- Publication number 20040244693
- Publication date Dec 9, 2004
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slot aray antenna and plasma processing apparatus
- Publication number 20040155829
- Publication date Aug 12, 2004
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processor and plasma processing method
- Publication number 20040112541
- Publication date Jun 17, 2004
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma device and plasma generating method
- Publication number 20040095074
- Publication date May 20, 2004
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma device and plasma generating method
- Publication number 20040051464
- Publication date Mar 18, 2004
- Nobuo Ishii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma device and plasma generating method
- Publication number 20040045672
- Publication date Mar 11, 2004
- Nobou Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ASSISTED PROCESSING SYSTEM AND PLASMA-ASSISTED PROCESSING ME...
- Publication number 20030150846
- Publication date Aug 14, 2003
- Tokyo Electron Ltd.
- Nobuo Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20010008122
- Publication date Jul 19, 2001
- Naohisa Goto
- H01 - BASIC ELECTRIC ELEMENTS

Makoto Ando

Person

Patents Grantslast 30 patents

Plasma device and plasma generating method

Slot array antenna and plasma processing apparatus

Plasma device and plasma generating method

Plasma device and plasma generating method

Plasma-assisted processing system and plasma-assisted processing me...

Plasma processing apparatus and plasma processing method

Plasma processing apparatus

Plasma treatment system

Plasma processing method and apparatus

Plasma processing apparatus

Polarization-universal radial line slot antenna

Slotted leaky waveguide array antenna

Flat circular unidirectional microwave antenna

Patents Applicationslast 30 patents

Slot array antenna and plasma processing apparatus

Plasma processing device and plasma generating method

Electromagnetic field supply apparatus and plasma processing device

Slot aray antenna and plasma processing apparatus

Plasma processor and plasma processing method

Plasma device and plasma generating method

Plasma device and plasma generating method

Plasma device and plasma generating method

PLASMA-ASSISTED PROCESSING SYSTEM AND PLASMA-ASSISTED PROCESSING ME...

Plasma processing apparatus