Makoto ARAI

Person

Sammu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thin substrate processing device
- Patent number 10,370,757
- Issue date Aug 6, 2019
- Ulvac, Inc.
- Tetsushi Fujinaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Touch panel, method of producing the same, optical thin film substr...
- Patent number 9,891,731
- Issue date Feb 13, 2018
- Ulvac, Inc.
- Manabu Harada
- G02 - OPTICS
Information Patent Grant
Method of forming thin film and apparatus for forming thin film
- Patent number 8,460,522
- Issue date Jun 11, 2013
- ULVAC, Inc.
- Yuichi Oishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
- Patent number 8,221,594
- Issue date Jul 17, 2012
- Ulvac, Inc.
- Yasuhiko Akamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering electrode, and sputtering apparatus provided w...
- Patent number 8,172,993
- Issue date May 8, 2012
- ULVAC, Inc.
- Yasuhiko Akamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Cathode Unit for Magnetron Sputtering Apparatus and Magnetron Sputt...
- Publication number 20230207295
- Publication date Jun 29, 2023
- Ulvac, Inc.
- Toshiya Aoyagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN SUBSTRATE PROCESSING DEVICE
- Publication number 20160376697
- Publication date Dec 29, 2016
- ULVAC, Inc.
- Tetsushi Fujinaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TOUCH PANEL, METHOD OF PRODUCING THE SAME, OPTICAL THIN FILM SUBSTR...
- Publication number 20160109971
- Publication date Apr 21, 2016
- ULVAC, Inc.
- Manabu Harada
- G02 - OPTICS
Information Patent Application
Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...
- Publication number 20110198213
- Publication date Aug 18, 2011
- Ulvac, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...
- Publication number 20110201150
- Publication date Aug 18, 2011
- Ulvac, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...
- Publication number 20110195562
- Publication date Aug 11, 2011
- ULVAC, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Processing Apparatus
- Publication number 20110180402
- Publication date Jul 28, 2011
- ULVAC, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
- Publication number 20110048926
- Publication date Mar 3, 2011
- ULVAC, Inc.
- Yasuhiko AKAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM
- Publication number 20100155225
- Publication date Jun 24, 2010
- Yuichi Oishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING ELECTRODE, AND SPUTTERING APPARATUS PROIDED WI...
- Publication number 20100051454
- Publication date Mar 4, 2010
- Yasuhiko Akamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron sputtering method and magnetron sputtering apparatus
- Publication number 20070158180
- Publication date Jul 12, 2007
- ULVAC, Inc.
- Atsushi Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Makoto ARAI

Person

Patents Grantslast 30 patents

Thin substrate processing device

Touch panel, method of producing the same, optical thin film substr...

Method of forming thin film and apparatus for forming thin film

Magnetron sputtering apparatus and magnetron sputtering method

Magnetron sputtering electrode, and sputtering apparatus provided w...

Patents Applicationslast 30 patents

Cathode Unit for Magnetron Sputtering Apparatus and Magnetron Sputt...

THIN SUBSTRATE PROCESSING DEVICE

TOUCH PANEL, METHOD OF PRODUCING THE SAME, OPTICAL THIN FILM SUBSTR...

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...

Vacuum Processing Apparatus

MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD

METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM

MAGNETRON SPUTTERING ELECTRODE, AND SPUTTERING APPARATUS PROIDED WI...

Magnetron sputtering method and magnetron sputtering apparatus