Makoto EZUMI

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle instrument
- Patent number 9,230,775
- Issue date Jan 5, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample electrification measurement method and charged particle beam...
- Patent number 8,835,844
- Issue date Sep 16, 2014
- Hitachi, Ltd.
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,698,080
- Issue date Apr 15, 2014
- Hitachi High-Technologies Corporation
- Noriaki Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,686,380
- Issue date Apr 1, 2014
- Hitachi High-Technologies Corporation
- Souichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting and measuring sample and scanning electron mi...
- Patent number 8,481,934
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam scanning method and charged particle beam app...
- Patent number 8,338,781
- Issue date Dec 25, 2012
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 8,080,789
- Issue date Dec 20, 2011
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope having a monochromator
- Patent number 8,067,733
- Issue date Nov 29, 2011
- Hitachi High-Technologies Corporation
- Wataru Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,977,632
- Issue date Jul 12, 2011
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting and measuring sample and scanning electron mi...
- Patent number 7,960,696
- Issue date Jun 14, 2011
- Hitachi High-Technologies Corporation
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam scanning method and charged particle beam app...
- Patent number 7,935,925
- Issue date May 3, 2011
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monochromator and scanning electron microscope using the same
- Patent number 7,838,827
- Issue date Nov 23, 2010
- Hitachi High-Technologies Corporation
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,718,976
- Issue date May 18, 2010
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, aberration correction value calcul...
- Patent number 7,714,286
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample electrification measurement method and charged particle beam...
- Patent number 7,700,918
- Issue date Apr 20, 2010
- Hitachi, Ltd.
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring dimensions of sample and scanning electron mic...
- Patent number 7,659,508
- Issue date Feb 9, 2010
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,642,514
- Issue date Jan 5, 2010
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope having a monochromator
- Patent number 7,612,336
- Issue date Nov 3, 2009
- Hitachi High-Technologies Corporation
- Wataru Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam alignment method and charged particle beam ap...
- Patent number 7,605,381
- Issue date Oct 20, 2009
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,566,872
- Issue date Jul 28, 2009
- Hitachi High-Technologies Corporation
- Ritsuo Fukaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,459,681
- Issue date Dec 2, 2008
- Hitachi High-Technologies Corporation
- Noriaki Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,442,923
- Issue date Oct 28, 2008
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and charged particle beam irradiati...
- Patent number 7,408,172
- Issue date Aug 5, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,399,966
- Issue date Jul 15, 2008
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Sample electrification measurement method and charged particle beam...
- Patent number 7,372,028
- Issue date May 13, 2008
- Hitachi, Ltd.
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam emitting device and method for adjusting the...
- Patent number 7,355,174
- Issue date Apr 8, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,329,868
- Issue date Feb 12, 2008
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Monochromator and scanning electron microscope using the same
- Patent number 7,315,024
- Issue date Jan 1, 2008
- Hitachi High-Technologies Corporation
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,294,835
- Issue date Nov 13, 2007
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and charged particle beam irradiati...
- Patent number 7,282,722
- Issue date Oct 16, 2007
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20140001359
- Publication date Jan 2, 2014
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND LENGTH MEASURING METHOD USING THE...
- Publication number 20130292568
- Publication date Nov 7, 2013
- Daisuke Bizen
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE INSTRUMENT
- Publication number 20120286160
- Publication date Nov 15, 2012
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20110215243
- Publication date Sep 8, 2011
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM SCANNING METHOD AND CHARGED PARTICLE BEAM APP...
- Publication number 20110174975
- Publication date Jul 21, 2011
- Hitachi High-Technologies Corporation
- Yuko SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Electrification Measurement Method and Charged Particle Beam...
- Publication number 20100294929
- Publication date Nov 25, 2010
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE HAVING A MONOCHROMATOR
- Publication number 20100044565
- Publication date Feb 25, 2010
- Hitachi High-Technologies Corporation
- Wataru MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20100038535
- Publication date Feb 18, 2010
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...
- Publication number 20100006755
- Publication date Jan 14, 2010
- Mitsugo Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20090294697
- Publication date Dec 3, 2009
- Hitachi High-Technologies Corporation
- Souichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20090084954
- Publication date Apr 2, 2009
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope
- Publication number 20090065694
- Publication date Mar 12, 2009
- Noriaki Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090039259
- Publication date Feb 12, 2009
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...
- Publication number 20090008550
- Publication date Jan 8, 2009
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Monochromator and scanning electron microscope using the same
- Publication number 20080237463
- Publication date Oct 2, 2008
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample electrification measurement method and charged particle beam...
- Publication number 20080201091
- Publication date Aug 21, 2008
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Application
Changed particle beam emitting device and method for adjusting the...
- Publication number 20080179536
- Publication date Jul 31, 2008
- HITACHI HIGH-TECHNOLOGIES CORPORTION
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20080116376
- Publication date May 22, 2008
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam scanning method and charged particle beam app...
- Publication number 20080073528
- Publication date Mar 27, 2008
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20080067378
- Publication date Mar 20, 2008
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM IRRADIATI...
- Publication number 20080042074
- Publication date Feb 21, 2008
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20070221846
- Publication date Sep 27, 2007
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope having a monochromator
- Publication number 20070181805
- Publication date Aug 9, 2007
- Wataru Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20070057183
- Publication date Mar 15, 2007
- Noriaki Arai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20070045539
- Publication date Mar 1, 2007
- Ritsuo Fukaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20070023657
- Publication date Feb 1, 2007
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Monochromator and scanning electron microscope using the same
- Publication number 20060219910
- Publication date Oct 5, 2006
- Yoichi Ose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample electrification measurement method and charged particle beam...
- Publication number 20060219918
- Publication date Oct 5, 2006
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope
- Publication number 20060113474
- Publication date Jun 1, 2006
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope
- Publication number 20060071167
- Publication date Apr 6, 2006
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS

Makoto EZUMI

Person

Patents Grantslast 30 patents

Charged particle instrument

Sample electrification measurement method and charged particle beam...

Scanning electron microscope

Charged particle beam apparatus

Method for inspecting and measuring sample and scanning electron mi...

Charged particle beam scanning method and charged particle beam app...

Sample dimension measuring method and scanning electron microscope

Scanning electron microscope having a monochromator

Scanning electron microscope

Method for inspecting and measuring sample and scanning electron mi...

Charged particle beam scanning method and charged particle beam app...

Monochromator and scanning electron microscope using the same

Charged particle beam apparatus

Charged particle beam apparatus, aberration correction value calcul...

Sample electrification measurement method and charged particle beam...

Method for measuring dimensions of sample and scanning electron mic...

Charged particle beam apparatus

Scanning electron microscope having a monochromator

Charged particle beam alignment method and charged particle beam ap...

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope

Charged particle beam apparatus and charged particle beam irradiati...

Scanning electron microscope

Sample electrification measurement method and charged particle beam...

Charged particle beam emitting device and method for adjusting the...

Charged particle beam apparatus

Monochromator and scanning electron microscope using the same

Scanning electron microscope

Charged particle beam apparatus and charged particle beam irradiati...

Patents Applicationslast 30 patents

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

SCANNING ELECTRON MICROSCOPE AND LENGTH MEASURING METHOD USING THE...

CHARGED PARTICLE INSTRUMENT

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

CHARGED PARTICLE BEAM SCANNING METHOD AND CHARGED PARTICLE BEAM APP...

Sample Electrification Measurement Method and Charged Particle Beam...

SCANNING ELECTRON MICROSCOPE HAVING A MONOCHROMATOR

Sample dimension measuring method and scanning electron microscope

CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...

Charged particle beam apparatus

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

Scanning electron microscope

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...

Monochromator and scanning electron microscope using the same

Sample electrification measurement method and charged particle beam...

Changed particle beam emitting device and method for adjusting the...

Charged particle beam apparatus

Charged particle beam scanning method and charged particle beam app...

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM IRRADIATI...

Scanning electron microscope

Scanning electron microscope having a monochromator

Scanning electron microscope

Scanning electron microscope

Charged particle beam apparatus

Monochromator and scanning electron microscope using the same

Sample electrification measurement method and charged particle beam...

Scanning electron microscope

Scanning electron microscope