Makoto FUJIKAWA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus, film forming method, and storage medium
- Patent number 10,960,435
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Makoto Fujikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,790,135
- Issue date Sep 29, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,755,971
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,748,782
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and vacuum processing...
- Patent number 10,629,448
- Issue date Apr 21, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method, substrate processing app...
- Patent number 10,490,405
- Issue date Nov 26, 2019
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,446,438
- Issue date Oct 15, 2019
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving chemical resistance of polymerized film, polym...
- Patent number 9,708,507
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Kippei Sugita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polymerized film forming method
- Patent number 9,683,128
- Issue date Jun 20, 2017
- Tokyo Electron Limited
- Makoto Fujikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON CARBIDE-CONTAINING FILM
- Publication number 20230154744
- Publication date May 18, 2023
- Tokyo Electron Limited
- Susumu YAMAUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON CARBIDE-CONTAINING FILM
- Publication number 20230146757
- Publication date May 11, 2023
- Tokyo Electron Limited
- Makoto FUJIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210047724
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Syuji NOZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20190393083
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, FILM FORMING APPARATUS, CONTROL METHOD, FILM FORMIN...
- Publication number 20190390347
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190122883
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20190122894
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20180286744
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM
- Publication number 20180264516
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Makoto FUJIKAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method of Manufacturing Semiconductor Device and Vacuum Processing...
- Publication number 20180269069
- Publication date Sep 20, 2018
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...
- Publication number 20180261458
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polymerized Film Forming Method and Film Forming Apparatus
- Publication number 20150240120
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Makoto FUJIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Improving Chemical Resistance of Polymerized Film, Polym...
- Publication number 20150240121
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Makoto FUJIKAWA

Person

Patents Grantslast 30 patents

Film forming apparatus, film forming method, and storage medium

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device and vacuum processing...

Semiconductor device manufacturing method, substrate processing app...

Method of manufacturing semiconductor device

Method for improving chemical resistance of polymerized film, polym...

Polymerized film forming method

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR FORMING SILICON CARBIDE-CONTAINING FILM

METHOD AND APPARATUS FOR FORMING SILICON CARBIDE-CONTAINING FILM

FILM FORMING APPARATUS AND FILM FORMING METHOD

Method of Manufacturing Semiconductor Device

CONTROL DEVICE, FILM FORMING APPARATUS, CONTROL METHOD, FILM FORMIN...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device

Method of Manufacturing Semiconductor Device

FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM

Method of Manufacturing Semiconductor Device and Vacuum Processing...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...

Polymerized Film Forming Method and Film Forming Apparatus

Method for Improving Chemical Resistance of Polymerized Film, Polym...