Makoto FURUNO

Person

Atsugi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition method and method for manufacturing semiconductor device
- Patent number 10,529,556
- Issue date Jan 7, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and method for manufacturing semiconductor device
- Patent number 9,698,008
- Issue date Jul 4, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning film formation apparatus and method for manufac...
- Patent number 9,044,793
- Issue date Jun 2, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Toriumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Deposition method and method for manufacturing semiconductor device
- Patent number 9,006,046
- Issue date Apr 14, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing display device
- Patent number 8,987,068
- Issue date Mar 24, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Grant
Method for forming semiconductor region and method for manufacturin...
- Patent number 8,846,530
- Issue date Sep 30, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Makoto Furuno
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Nonvolatile semiconductor memory device
- Patent number 8,729,620
- Issue date May 20, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Grant
Semiconductor film, method for manufacturing the same, and power st...
- Patent number 8,643,182
- Issue date Feb 4, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Tomokazu Yokoi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Display device
- Patent number 8,629,442
- Issue date Jan 14, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Grant
Semiconductor substrate and manufacturing method of semiconductor d...
- Patent number 8,592,908
- Issue date Nov 26, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method and method for manufacturing semiconductor device
- Patent number 8,518,761
- Issue date Aug 27, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor film, method for manufacturing the same, and power st...
- Patent number 8,455,044
- Issue date Jun 4, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Tomokazu Yokoi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Thin film transistor having microcrystalline semiconductor layer
- Patent number 8,395,158
- Issue date Mar 12, 2013
- Semiconductor Energy Labortory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,309,406
- Issue date Nov 13, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device
- Patent number 8,310,474
- Issue date Nov 13, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Jun Koyama
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 8,263,421
- Issue date Sep 11, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of substrate provided with semiconductor films
- Patent number 8,247,307
- Issue date Aug 21, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method for manufacturing semiconduc...
- Patent number 8,247,315
- Issue date Aug 21, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Makoto Furuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus
- Patent number 8,242,562
- Issue date Aug 14, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonvolatile semiconductor memory device
- Patent number 8,227,863
- Issue date Jul 24, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Grant
Nonvolatile semiconductor memory device
- Patent number 8,212,302
- Issue date Jul 3, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoelectric conversion device and method for manufacturing the same
- Patent number 8,198,629
- Issue date Jun 12, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,101,444
- Issue date Jan 24, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid crystal display device and method for manufacturing the same...
- Patent number 8,101,467
- Issue date Jan 24, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Grant
Method for manufacturing thin film transistor and display device in...
- Patent number 8,030,147
- Issue date Oct 4, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nonvolatile semiconductor memory device
- Patent number 8,022,460
- Issue date Sep 20, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor having microcrystalline semiconductor layer an...
- Patent number 8,017,946
- Issue date Sep 13, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate and manufacturing method of semiconductor d...
- Patent number 7,989,273
- Issue date Aug 2, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, film deposition metho...
- Patent number 7,947,544
- Issue date May 24, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoelectric conversion device and method for manufacturing the same
- Patent number 7,888,167
- Issue date Feb 15, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170301538
- Publication date Oct 19, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150214043
- Publication date Jul 30, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME...
- Publication number 20140080238
- Publication date Mar 20, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Application
DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130337607
- Publication date Dec 19, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING THE SAME, AND POWER ST...
- Publication number 20130270679
- Publication date Oct 17, 2013
- Tomokazu YOKOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING FILM FORMATION APPARATUS AND METHOD FOR MANUFAC...
- Publication number 20130130476
- Publication date May 23, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi TORIUMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SOI SUBSTRATE
- Publication number 20130023108
- Publication date Jan 24, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Kazuya HANAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING THE SAME, AND POWER ST...
- Publication number 20120135302
- Publication date May 31, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Tomokazu Yokoi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20120094446
- Publication date Apr 19, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF ENERGY STORAGE DEVICE
- Publication number 20120003383
- Publication date Jan 5, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Makoto FURUNO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR REGION AND METHOD FOR MANUFACTURIN...
- Publication number 20120003807
- Publication date Jan 5, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Makoto FURUNO
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20110291093
- Publication date Dec 1, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD OF SEMICONDUCTOR D...
- Publication number 20110260285
- Publication date Oct 27, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20110256673
- Publication date Oct 20, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, FILM DEPOSITION METHO...
- Publication number 20110197815
- Publication date Aug 18, 2011
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Photoelectric Conversion Device and Method for Manufacturing the Same
- Publication number 20110193087
- Publication date Aug 11, 2011
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME...
- Publication number 20110186850
- Publication date Aug 4, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20110059562
- Publication date Mar 10, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SUBSTRATE PROVIDED WITH SEMICONDUCTOR FILMS
- Publication number 20100047998
- Publication date Feb 25, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOELECTRIC CONVERSION DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20090267066
- Publication date Oct 29, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20090233425
- Publication date Sep 17, 2009
- Makoto FURUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISPLAY DEVICE
- Publication number 20090160753
- Publication date Jun 25, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Jun Koyama
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, FILM DEPOSITION METHO...
- Publication number 20090137087
- Publication date May 28, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SUBSTRATE PROVIDED WITH SEMICONDUCTOR FILMS
- Publication number 20090081845
- Publication date Mar 26, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND DISPLAY DEVICE IN...
- Publication number 20090072237
- Publication date Mar 19, 2009
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method thereof
- Publication number 20090045401
- Publication date Feb 19, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20090047760
- Publication date Feb 19, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING DISPLAY DEVICE
- Publication number 20090047758
- Publication date Feb 19, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20090047759
- Publication date Feb 19, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20090047761
- Publication date Feb 19, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Makoto FURUNO

Person

Patents Grantslast 30 patents

Deposition method and method for manufacturing semiconductor device

Deposition method and method for manufacturing semiconductor device

Method for cleaning film formation apparatus and method for manufac...

Deposition method and method for manufacturing semiconductor device

Method for manufacturing display device

Method for forming semiconductor region and method for manufacturin...

Nonvolatile semiconductor memory device

Semiconductor film, method for manufacturing the same, and power st...

Display device

Semiconductor substrate and manufacturing method of semiconductor d...

Deposition method and method for manufacturing semiconductor device

Semiconductor film, method for manufacturing the same, and power st...

Thin film transistor having microcrystalline semiconductor layer

Method for manufacturing semiconductor device

Display device

Manufacturing method of semiconductor device

Manufacturing method of substrate provided with semiconductor films

Plasma processing apparatus and method for manufacturing semiconduc...

Film deposition apparatus

Nonvolatile semiconductor memory device

Nonvolatile semiconductor memory device

Photoelectric conversion device and method for manufacturing the same

Method for manufacturing semiconductor device

Liquid crystal display device and method for manufacturing the same...

Method for manufacturing thin film transistor and display device in...

Nonvolatile semiconductor memory device

Thin film transistor having microcrystalline semiconductor layer an...

Semiconductor substrate and manufacturing method of semiconductor d...

Method of manufacturing semiconductor device, film deposition metho...

Photoelectric conversion device and method for manufacturing the same

Patents Applicationslast 30 patents

DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME...

DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING THE SAME, AND POWER ST...

METHOD FOR CLEANING FILM FORMATION APPARATUS AND METHOD FOR MANUFAC...

METHOD FOR MANUFACTURING SOI SUBSTRATE

SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING THE SAME, AND POWER ST...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

MANUFACTURING METHOD OF ENERGY STORAGE DEVICE

METHOD FOR FORMING SEMICONDUCTOR REGION AND METHOD FOR MANUFACTURIN...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD OF SEMICONDUCTOR D...

DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, FILM DEPOSITION METHO...

Photoelectric Conversion Device and Method for Manufacturing the Same

LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

MANUFACTURING METHOD OF SUBSTRATE PROVIDED WITH SEMICONDUCTOR FILMS

PHOTOELECTRIC CONVERSION DEVICE AND METHOD FOR MANUFACTURING THE SAME

PLASMA PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUC...

DISPLAY DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, FILM DEPOSITION METHO...

MANUFACTURING METHOD OF SUBSTRATE PROVIDED WITH SEMICONDUCTOR FILMS

METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND DISPLAY DEVICE IN...

Semiconductor device and manufacturing method thereof

Method for manufacturing semiconductor device

METHOD OF MANUFACTURING DISPLAY DEVICE

Method for manufacturing semiconductor device

Manufacturing method of semiconductor device