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Makoto Hiramoto
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,563,953
Issue date
Oct 22, 2013
Nuflare Technology, Inc.
Noriaki Nakayamada
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam apparatus and charged particle beam resolutio...
Patent number
7,612,347
Issue date
Nov 3, 2009
Nuflare Technology, Inc.
Makoto Hiramoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20120068089
Publication date
Mar 22, 2012
NuFlare Technology, Inc.
Noriaki NAKAYAMADA
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithography method of electron beam
Publication number
20100178611
Publication date
Jul 15, 2010
NuFlare Technology, Inc.
Hirohito Anze
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD
Publication number
20080265174
Publication date
Oct 30, 2008
NuFlare Technology, Inc.
Makoto HIRAMOTO
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM RESOLUTIO...
Publication number
20080011963
Publication date
Jan 17, 2008
NuFlare Technology, Inc.
Makoto HIRAMOTO
B82 - NANO-TECHNOLOGY
Information
Patent Application
FORMING METHOD OF RESIST PATTERN AND WRITING METHOD OF CHARGED PART...
Publication number
20070243487
Publication date
Oct 18, 2007
NuFlare Technology, Inc.
Hirohito Anze
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY