Makoto Hirano

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,538,716
- Issue date Dec 27, 2022
- Kokusai Electric Corporation
- Tomoya Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,911,635
- Issue date Mar 6, 2018
- Hitachi Kokusai Electric, Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, purging apparatus, method of manufa...
- Patent number 9,695,509
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor device manu...
- Patent number 8,777,553
- Issue date Jul 15, 2014
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate treatment equipment and manufacturing method of substrate
- Patent number 8,424,485
- Issue date Apr 23, 2013
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,245,389
- Issue date Aug 21, 2012
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 7,975,376
- Issue date Jul 12, 2011
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus and manufacturing of a semico...
- Patent number 7,751,922
- Issue date Jul 6, 2010
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240254630
- Publication date Aug 1, 2024
- Kokusai Electric Corporation
- Hideo TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230230861
- Publication date Jul 20, 2023
- Kokusai Electric Corporation
- Takefumi MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ELEVATOR AND METHOD OF MANUFACTURIN...
- Publication number 20220199443
- Publication date Jun 23, 2022
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220170160
- Publication date Jun 2, 2022
- Kokusai Electric Corporation
- Makoto HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200303234
- Publication date Sep 24, 2020
- Kokusai Electric Corporation
- Tomoya MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150380288
- Publication date Dec 31, 2015
- Hitachi Kokusai Electric Inc.
- Makoto HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGING APPARATUS, METHOD OF MANUFA...
- Publication number 20140112739
- Publication date Apr 24, 2014
- Hitachi Kokusai Electric Inc.
- Makoto HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT EQUIPMENT AND MANUFACTURING METHOD OF SUBSTRATE
- Publication number 20130098291
- Publication date Apr 25, 2013
- HITACI KOKUSAI ELECTRIC INC.
- Makoto HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANU...
- Publication number 20120289058
- Publication date Nov 15, 2012
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, GAS NOZZLE AND METHOD OF PROCESSING...
- Publication number 20120076936
- Publication date Mar 29, 2012
- Hitachi Kokusai Electric Inc.
- Makoto HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing a semiconductor device
- Publication number 20110183446
- Publication date Jul 28, 2011
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treatment equipment and manufacturing method of substrate
- Publication number 20100170436
- Publication date Jul 8, 2010
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Manufacturing Apparatus And Semiconductor Device Manu...
- Publication number 20080236487
- Publication date Oct 2, 2008
- Hitachi Kokusai Electric Inc.,
- Makoto Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treatment equipment and manufacturing method of substrate
- Publication number 20080193274
- Publication date Aug 14, 2008
- Hitachi Kokusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Manufacturing Apparatus and Manufacturing of a Semico...
- Publication number 20080127467
- Publication date Jun 5, 2008
- HITACHI KOKUSAI ELECTRIC INC.
- Makoto Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing device and method of producing substrates
- Publication number 20060183070
- Publication date Aug 17, 2006
- Hitachi Kosusai Electric Inc.
- Makoto Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Makoto Hirano

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, purging apparatus, method of manufa...

Semiconductor manufacturing apparatus and semiconductor device manu...

Substrate treatment equipment and manufacturing method of substrate

Method of manufacturing a semiconductor device

Method of manufacturing a semiconductor device

Semiconductor manufacturing apparatus and manufacturing of a semico...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, ELEVATOR AND METHOD OF MANUFACTURIN...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, PURGING APPARATUS, METHOD OF MANUFA...

SUBSTRATE TREATMENT EQUIPMENT AND MANUFACTURING METHOD OF SUBSTRATE

SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANU...

SUBSTRATE PROCESSING APPARATUS, GAS NOZZLE AND METHOD OF PROCESSING...

Method of manufacturing a semiconductor device

Substrate treatment equipment and manufacturing method of substrate

Semiconductor Manufacturing Apparatus And Semiconductor Device Manu...

Substrate treatment equipment and manufacturing method of substrate

Semiconductor Manufacturing Apparatus and Manufacturing of a Semico...

Substrate processing device and method of producing substrates