Makoto Horimizu

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Patents Grantslast 30 patents

Information Patent Grant
Bolt and plasma processing apparatus provided with same
- Patent number 7,901,510
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Makoto Horimizu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Bolt and plasma processing apparatus provided with same
- Patent number 7,708,834
- Issue date May 4, 2010
- Tokyo Electron Limited
- Makoto Horimizu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
BOLT AND PLASMA PROCESSING APPARATUS PROVIDED WITH SAME
- Publication number 20100192354
- Publication date Aug 5, 2010
- TOKYO ELECTRON LIMITED
- Makoto Horimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Bolt and plasma processing apparatus provided with same
- Publication number 20060118042
- Publication date Jun 8, 2006
- TOKYO ELECTRON LIMITED
- Makoto Horimizu
- H01 - BASIC ELECTRIC ELEMENTS