Makoto Inagawa

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Thin film encapsulation mask preheat and substrate buffer chamber
- Patent number 10,604,846
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slit valve door with moving mating part
- Patent number 10,453,718
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Mehran Behdjat
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Target cooling through gun drilled holes
- Patent number 10,294,559
- Issue date May 21, 2019
- Applied Materials, Inc.
- Yoshiaki Tanase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer robot with substrate cooling
- Patent number 10,265,868
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vertical inline CVD system
- Patent number 9,922,854
- Issue date Mar 20, 2018
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer robot with chamber and substrate monitoring capa...
- Patent number 9,691,650
- Issue date Jun 27, 2017
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ground return for plasma processes
- Patent number 9,382,621
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical inline CVD system
- Patent number 9,324,597
- Issue date Apr 26, 2016
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooled PVD shield
- Patent number 9,222,165
- Issue date Dec 29, 2015
- Applied Materials, Inc.
- Akihiro Hosokawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ganged scanning of multiple magnetrons, especially two level folded...
- Patent number 8,961,756
- Issue date Feb 24, 2015
- Applied Materials, Inc.
- Makoto Inagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam welding of large vacuum chamber body having a high em...
- Patent number 8,915,389
- Issue date Dec 23, 2014
- Applied Materials, Inc.
- Shinichi Kurita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Slit valve door able to compensate for chamber deflection
- Patent number 8,567,756
- Issue date Oct 29, 2013
- Applied Materials, Inc.
- Mehran Behdjat
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Electron beam welding of large vacuum chamber body having a high em...
- Patent number 8,528,762
- Issue date Sep 10, 2013
- Applied Materials, Inc.
- Shinichi Kurita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater plate and heater element assembly
- Patent number D687535
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Makoto Inagawa
- D23 - Environmental heating and cooling
Information Patent Grant
Heater plate and heater element assembly
- Patent number D670372
- Issue date Nov 6, 2012
- Applied Materials, Inc.
- Makoto Inagawa
- D23 - Environmental heating and cooling
Information Patent Grant
Controllable target cooling
- Patent number 8,182,661
- Issue date May 22, 2012
- Applied Materials, Inc.
- Yoshiaki Tanase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evacuable magnetron chamber
- Patent number 8,097,133
- Issue date Jan 17, 2012
- Applied Materials, Inc.
- Makoto Inagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock chamber for large area substrate processing system
- Patent number 8,070,408
- Issue date Dec 6, 2011
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Partially suspended rolling magnetron
- Patent number 7,879,210
- Issue date Feb 1, 2011
- Applied Materials, Inc.
- Makoto Inagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensors for dynamically detecting substrate breakage and misalignme...
- Patent number 7,834,994
- Issue date Nov 16, 2010
- Applied Materials, Inc.
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Grant
PVD target
- Patent number 7,815,782
- Issue date Oct 19, 2010
- Applied Materials, Inc.
- Makoto Inagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock roller ball support
- Patent number D622744
- Issue date Aug 31, 2010
- Applied Materials, Inc.
- Makoto Inagawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Heating and cooling plate for a vacuum chamber
- Patent number 7,652,227
- Issue date Jan 26, 2010
- Applied Materials, Inc.
- Makoto Inagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for uniform heating of large area substrates
- Patent number 7,442,900
- Issue date Oct 28, 2008
- Applied Materials, Inc.
- Makoto Inagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensors for dynamically detecting substrate breakage and misalignme...
- Patent number 7,440,091
- Issue date Oct 21, 2008
- Applied Materials, Inc.
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Grant
Integrated PVD system using designated PVD chambers
- Patent number 7,432,184
- Issue date Oct 7, 2008
- Applied Materials, Inc.
- Akihiro Hosokawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating and cooling of substrate support
- Patent number 7,429,718
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Makoto Inagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin-rinse-dryer
- Patent number 7,226,514
- Issue date Jun 5, 2007
- Applied Materials, Inc.
- Anwar Husain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for uniform substrate heating
- Patent number 6,998,579
- Issue date Feb 14, 2006
- Applied Materials, Inc.
- Makoto Inagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Roller that avoids substrate slippage
- Patent number 6,918,864
- Issue date Jul 19, 2005
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THIN FILM ENCAPSULATION MASK PREHEAT AND SUBSTRATE BUFFER CHAMBER
- Publication number 20180119285
- Publication date May 3, 2018
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DODECADON TRANSFER CHAMBER AND PROCESSING SYSTEM HAVING THE SAME
- Publication number 20170352562
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUND RETURN FOR PLASMA PROCESSES
- Publication number 20160305025
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Soo Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLIT VALVE DOOR WITH MOVING MATING PART
- Publication number 20140023460
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...
- Publication number 20130327764
- Publication date Dec 12, 2013
- Applied Materials, Inc.
- SHINICHI KURITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE SUBSTRATE SUPPORT AND ALIGNMENT...
- Publication number 20120251964
- Publication date Oct 4, 2012
- Applied Materials, Inc.
- MAKOTO INAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Target Cooling Through Gun Drilled Holes
- Publication number 20120175250
- Publication date Jul 12, 2012
- Applied Materials, Inc.
- Yoshiaki Tanase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLED PVD SHIELD
- Publication number 20120111273
- Publication date May 10, 2012
- Akihiro Hosokawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL INLINE CVD SYSTEM
- Publication number 20120031333
- Publication date Feb 9, 2012
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL INLINE CVD SYSTEM
- Publication number 20120031335
- Publication date Feb 9, 2012
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING ZINC OXIDE TRANSPARENT CONDUCTIVE OXIDES ONTO L...
- Publication number 20120000773
- Publication date Jan 5, 2012
- APPLIED MATERIALS, INC.
- Yan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLED DARK SPACE SHIELD FOR MULTI-CATHODE DESIGN
- Publication number 20120000424
- Publication date Jan 5, 2012
- APPLIED MATERIALS, INC.
- Makoto Inagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFER ROBOT WITH SUBSTRATE COOLING
- Publication number 20110182699
- Publication date Jul 28, 2011
- Applied Materials, Inc.
- SHINICHI KURITA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER ROBOT WITH CHAMBER AND SUBSTRATE MONITORING CAPA...
- Publication number 20110076118
- Publication date Mar 31, 2011
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUND RETURN FOR PLASMA PROCESSES
- Publication number 20100196626
- Publication date Aug 5, 2010
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...
- Publication number 20100122982
- Publication date May 20, 2010
- Applied Materials, Inc.
- SHINICHI KURITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOAD LOCK CHAMBER FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM
- Publication number 20100054905
- Publication date Mar 4, 2010
- MEHRAN BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLOTTED TSSL DOOR TO COUPLE O-RING WITH MOVING MATING PART
- Publication number 20100050534
- Publication date Mar 4, 2010
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUBE DIFFUSER FOR LOAD LOCK CHAMBER
- Publication number 20100011785
- Publication date Jan 21, 2010
- Applied Materials, Inc.
- Mehran Behdjat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC SCRIBE ALIGNMENT FOR LASER SCRIBING, WELDING OR ANY PATTERN...
- Publication number 20090321399
- Publication date Dec 31, 2009
- Applied Materials, Inc.
- Makoto Inagawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNME...
- Publication number 20090050270
- Publication date Feb 26, 2009
- William A. Bagley
- G01 - MEASURING TESTING
Information Patent Application
MONOLITHIC TARGET FOR FLAT PANEL APPLICATION
- Publication number 20080067058
- Publication date Mar 20, 2008
- BRADLEY O. STIMSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ganged Scanning of Multiple Magnetrons, Especially Two Level Folded...
- Publication number 20080029387
- Publication date Feb 7, 2008
- Applied Materials, Inc.
- Makoto INAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON ASSEMBLY
- Publication number 20080023319
- Publication date Jan 31, 2008
- HIEN MINH HUU LE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLED DARK SPACE SHIELD FOR MULTI-CATHODE DESIGN
- Publication number 20080017501
- Publication date Jan 24, 2008
- Makoto INAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLED ANODES
- Publication number 20080011601
- Publication date Jan 17, 2008
- APPLIED MATERIALS, INC.
- ALLEN KA-LING LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLED PVD SHIELD
- Publication number 20080006523
- Publication date Jan 10, 2008
- Akihiro Hosokawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically Coupled Target Panels
- Publication number 20080000768
- Publication date Jan 3, 2008
- Bradley O. Stimson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Backing plate assembly
- Publication number 20070295598
- Publication date Dec 27, 2007
- Makoto Inagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET
- Publication number 20070295596
- Publication date Dec 27, 2007
- Makoto INAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Makoto Inagawa

Person

Patents Grantslast 30 patents

Thin film encapsulation mask preheat and substrate buffer chamber

Slit valve door with moving mating part

Target cooling through gun drilled holes

Transfer robot with substrate cooling

Vertical inline CVD system

Substrate transfer robot with chamber and substrate monitoring capa...

Ground return for plasma processes

Vertical inline CVD system

Cooled PVD shield

Ganged scanning of multiple magnetrons, especially two level folded...

Electron beam welding of large vacuum chamber body having a high em...

Slit valve door able to compensate for chamber deflection

Electron beam welding of large vacuum chamber body having a high em...

Heater plate and heater element assembly

Heater plate and heater element assembly

Controllable target cooling

Evacuable magnetron chamber

Load lock chamber for large area substrate processing system

Partially suspended rolling magnetron

Sensors for dynamically detecting substrate breakage and misalignme...

PVD target

Load lock roller ball support

Heating and cooling plate for a vacuum chamber

Chamber for uniform heating of large area substrates

Sensors for dynamically detecting substrate breakage and misalignme...

Integrated PVD system using designated PVD chambers

Heating and cooling of substrate support

Spin-rinse-dryer

Chamber for uniform substrate heating

Roller that avoids substrate slippage

Patents Applicationslast 30 patents

THIN FILM ENCAPSULATION MASK PREHEAT AND SUBSTRATE BUFFER CHAMBER

DODECADON TRANSFER CHAMBER AND PROCESSING SYSTEM HAVING THE SAME

GROUND RETURN FOR PLASMA PROCESSES

SLIT VALVE DOOR WITH MOVING MATING PART

ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...

METHOD AND APPARATUS FOR SELECTIVE SUBSTRATE SUPPORT AND ALIGNMENT...

Target Cooling Through Gun Drilled Holes

COOLED PVD SHIELD

VERTICAL INLINE CVD SYSTEM

VERTICAL INLINE CVD SYSTEM

REACTIVE SPUTTERING ZINC OXIDE TRANSPARENT CONDUCTIVE OXIDES ONTO L...

COOLED DARK SPACE SHIELD FOR MULTI-CATHODE DESIGN

TRANSFER ROBOT WITH SUBSTRATE COOLING

SUBSTRATE TRANSFER ROBOT WITH CHAMBER AND SUBSTRATE MONITORING CAPA...

GROUND RETURN FOR PLASMA PROCESSES

ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...

LOAD LOCK CHAMBER FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM

SLOTTED TSSL DOOR TO COUPLE O-RING WITH MOVING MATING PART

TUBE DIFFUSER FOR LOAD LOCK CHAMBER

DYNAMIC SCRIBE ALIGNMENT FOR LASER SCRIBING, WELDING OR ANY PATTERN...

SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNME...

MONOLITHIC TARGET FOR FLAT PANEL APPLICATION

Ganged Scanning of Multiple Magnetrons, Especially Two Level Folded...

MAGNETRON ASSEMBLY

COOLED DARK SPACE SHIELD FOR MULTI-CATHODE DESIGN

COOLED ANODES

COOLED PVD SHIELD

Electrically Coupled Target Panels

Backing plate assembly

PVD TARGET