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Makoto Ishida
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Kanagawa, JP
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last 30 patents
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Patent Grant
Monitoring device, ion implantation device, and monitoring method
Patent number
9,741,534
Issue date
Aug 22, 2017
Lapis Semiconductor Co., Ltd.
Makoto Ishida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MONITORING DEVICE, ION IMPLANTATION DEVICE, AND MONITORING METHOD
Publication number
20160217973
Publication date
Jul 28, 2016
LAPIS SEMICONDUCTOR CO., LTD.
Makoto Ishida
G01 - MEASURING TESTING