Makoto Kashibe

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Tokuyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,232,932
- Issue date Jan 25, 2022
- HITACHI HIGH-TECH CORPORATION
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply, a semiconductor making apparatus and a semiconductor...
- Patent number 7,125,730
- Issue date Oct 24, 2006
- Hitachi High-Technologies Corporation
- Youji Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus and method
- Patent number 7,025,895
- Issue date Apr 11, 2006
- Hitachi High-Technologies Corporation
- Youji Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply, a semiconductor making apparatus and a semiconductor...
- Patent number 6,713,885
- Issue date Mar 30, 2004
- Hitachi High-Technologies Corporation
- Youji Takahashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220367156
- Publication date Nov 17, 2022
- Hitachi High-Tech Corporation
- Tatsuya Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20190164725
- Publication date May 30, 2019
- Hitachi High-Technologies Corporation
- Masatoshi KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Power supply, a semiconductor making apparatus and a semiconductor...
- Publication number 20040056706
- Publication date Mar 25, 2004
- Youji Takahashi
- G01 - MEASURING TESTING
Information Patent Application
Plasma processing apparatus and method
- Publication number 20040031566
- Publication date Feb 19, 2004
- Youji Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Power supply, a semiconductor making apparatus and a semiconductor...
- Publication number 20030162309
- Publication date Aug 28, 2003
- Youji Takahashi
- G01 - MEASURING TESTING