Makoto Kashiwagi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 11,865,665
- Issue date Jan 9, 2024
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece supporting apparatus and workpiece supporting method
- Patent number 11,804,398
- Issue date Oct 31, 2023
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Top ring for holding a substrate and substrate processing apparatus
- Patent number 11,701,750
- Issue date Jul 18, 2023
- Ebara Corporation
- Yu Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,697,184
- Issue date Jul 11, 2023
- Ebara Corporation
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Grant
Laminated membrane, substrate holder including laminated membrane,...
- Patent number 11,638,980
- Issue date May 2, 2023
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,511,386
- Issue date Nov 29, 2022
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,511,389
- Issue date Nov 29, 2022
- Ebara Corporation
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Silicon bulk thermoelectric conversion material
- Patent number 11,456,406
- Issue date Sep 27, 2022
- Japan Science and Technology Agency
- Junichiro Shiomi
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Top ring for holding a substrate and substrate processing apparatus
- Patent number 11,400,561
- Issue date Aug 2, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head for holding substrate and substrate processing appar...
- Patent number 11,370,080
- Issue date Jun 28, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,331,768
- Issue date May 17, 2022
- Ebara Corporation
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus and substrate processing apparatus
- Patent number 11,335,588
- Issue date May 17, 2022
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Jig for a polishing apparatus
- Patent number 11,305,399
- Issue date Apr 19, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,180,853
- Issue date Nov 23, 2021
- Ebara Corporation
- Yu Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for polishing a substrate, and method for proc...
- Patent number 10,926,376
- Issue date Feb 23, 2021
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding parts
- Patent number D890824
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890825
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890823
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890822
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,458,020
- Issue date Oct 29, 2019
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,427,269
- Issue date Oct 1, 2019
- Ebara Corporation
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Grant
Exhaust gas abatement system
- Patent number 10,227,926
- Issue date Mar 12, 2019
- Ebara Corporation
- Kazumasa Hosotani
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Tubing pump
- Patent number 10,012,225
- Issue date Jul 3, 2018
- Adamant Namiki Preccision Jewel Co., Ltd.
- Masahiro Koyama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Tube clamp structure of tubing pump
- Patent number 9,541,221
- Issue date Jan 10, 2017
- Namiki Seimitsu Houseki Kabushiki Kaisha
- Masahiro Koyama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Tubing pump for delivering fluid in a tube
- Patent number 9,217,428
- Issue date Dec 22, 2015
- Namiki Precision Singapore Pte. Ltd.
- Masahiro Koyama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Exhaust gas cleaning apparatus
- Patent number 8,246,732
- Issue date Aug 21, 2012
- Ebara Corporation
- Hiroyuki Arai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBS...
- Publication number 20240416480
- Publication date Dec 19, 2024
- EBARA CORPORATION
- Kazuhiro TAJIMA
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING OF POLISHING APPARATUS AND POLISHING APPARATUS
- Publication number 20240316722
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
WORKPIECE PROCESSING APPARATUS AND WORKPIECE PROCESSING METHOD
- Publication number 20240165759
- Publication date May 23, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240109161
- Publication date Apr 4, 2024
- EBARA CORPORATION
- Satoru YAMAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20240091899
- Publication date Mar 21, 2024
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B24 - GRINDING POLISHING
Information Patent Application
HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240006204
- Publication date Jan 4, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230249313
- Publication date Aug 10, 2023
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20230055770
- Publication date Feb 23, 2023
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
WORKPIECE SUPPORTING APPARATUS AND WORKPIECE SUPPORTING METHOD
- Publication number 20220068695
- Publication date Mar 3, 2022
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210170543
- Publication date Jun 10, 2021
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Application
SILICON BULK THERMOELECTRIC CONVERSION MATERIAL
- Publication number 20210057626
- Publication date Feb 25, 2021
- Japan Science and Technology Agency
- Junichiro SHIOMI
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200402835
- Publication date Dec 24, 2020
- EBARA CORPORATION
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATED MEMBRANE, SUBSTRATE HOLDER INCLUDING LAMINATED MEMBRANE,...
- Publication number 20200316747
- Publication date Oct 8, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPAR...
- Publication number 20200306924
- Publication date Oct 1, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200246939
- Publication date Aug 6, 2020
- EBARA CORPORATION
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20200094371
- Publication date Mar 26, 2020
- EBARA CORPORATION
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200039024
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
JIG FOR A POLISHING APPARATUS
- Publication number 20200039025
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20200023486
- Publication date Jan 23, 2020
- EBARA CORPORATION
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190390335
- Publication date Dec 26, 2019
- EBARA CORPORATION
- Yu ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20190184519
- Publication date Jun 20, 2019
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20190131166
- Publication date May 2, 2019
- EBARA CORPORATION
- Makoto KASHIWAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20190118335
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...
- Publication number 20190054594
- Publication date Feb 21, 2019
- EBARA CORPORATION
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20170291273
- Publication date Oct 12, 2017
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160305022
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Yu ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUBE CLAMP STRUCTURE OF TUBING PUMP
- Publication number 20150285404
- Publication date Oct 8, 2015
- NAMIKI PRECISION SINGAPORE PTE. LTD.
- Masahiro Koyama
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
TUBING PUMP
- Publication number 20150275887
- Publication date Oct 1, 2015
- NAMIKI PRECISION SINGAPORE PTE. LTD.
- Masahiro Koyama
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Makoto Kashiwagi

Person

Patents Grantslast 30 patents

Substrate holding apparatus, substrate processing apparatus having...

Polishing apparatus

Workpiece supporting apparatus and workpiece supporting method

Top ring for holding a substrate and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Laminated membrane, substrate holder including laminated membrane,...

Polishing apparatus and polishing method

Polishing head and polishing apparatus

Silicon bulk thermoelectric conversion material

Top ring for holding a substrate and substrate processing apparatus

Polishing head for holding substrate and substrate processing appar...

Polishing head and polishing apparatus

Substrate holding apparatus and substrate processing apparatus

Jig for a polishing apparatus

Substrate processing apparatus and substrate processing method

Method and apparatus for polishing a substrate, and method for proc...

Substrate holding parts

Substrate holding parts

Substrate holding parts

Substrate holding parts

Substrate processing apparatus and substrate processing method

Polishing apparatus and polishing method

Exhaust gas abatement system

Tubing pump

Tube clamp structure of tubing pump

Tubing pump for delivering fluid in a tube

Exhaust gas cleaning apparatus

Patents Applicationslast 30 patents

SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBS...

TOP RING OF POLISHING APPARATUS AND POLISHING APPARATUS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

WORKPIECE PROCESSING APPARATUS AND WORKPIECE PROCESSING METHOD

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS

HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

POLISHING HEAD AND POLISHING APPARATUS

WORKPIECE SUPPORTING APPARATUS AND WORKPIECE SUPPORTING METHOD

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

SILICON BULK THERMOELECTRIC CONVERSION MATERIAL

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

LAMINATED MEMBRANE, SUBSTRATE HOLDER INCLUDING LAMINATED MEMBRANE,...

POLISHING HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPAR...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

POLISHING HEAD AND POLISHING APPARATUS

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

JIG FOR A POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

POLISHING HEAD AND POLISHING APPARATUS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

POLISHING APPARATUS

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TUBE CLAMP STRUCTURE OF TUBING PUMP

TUBING PUMP