Membership
Tour
Register
Log in
Makoto KAWABATA
Follow
Person
Toyama, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
9,028,191
Issue date
May 12, 2015
Hitachi Kokusai Electric Inc.
Takeshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240222086
Publication date
Jul 4, 2024
Kokusai Electric Corporation
Kazuyuki TOYODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATER ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANU...
Publication number
20240150897
Publication date
May 9, 2024
Kokusai Electric Corporation
Makoto KAWABATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
Publication number
20160093476
Publication date
Mar 31, 2016
Hitachi Kokusai Electric Inc.
Kazuyuki TOYODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20110311339
Publication date
Dec 22, 2011
Hitachi Kokusai Electric Inc.
Takeshi YASUI
H01 - BASIC ELECTRIC ELEMENTS