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Plasma processing method and apparatus
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Patent number 5,651,867
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Issue date Jul 29, 1997
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Hitachi, Ltd.
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Yuichi Kokaku
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Recording medium
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Patent number 5,409,738
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Issue date Apr 25, 1995
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Hitachi, Ltd.
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Satoshi Matsunuma
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C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
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Magnetic recording medium
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Patent number 4,713,288
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Issue date Dec 15, 1987
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Hitachi, Ltd.
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Yuuichi Kokaku
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G11 - INFORMATION STORAGE
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