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Makoto Mizuno
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Austin, TX, US
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last 30 patents
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Patent Grant
System and method for adjusting a position of a template
Patent number
10,969,680
Issue date
Apr 6, 2021
Canon Kabushiki Kaisha
Byung-Jin Choi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Imprint apparatus, foreign particle removal method, and method of m...
Patent number
10,201,927
Issue date
Feb 12, 2019
Canon Kabushiki Kaisha
Makoto Mizuno
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Patents Applications
last 30 patents
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Patent Application
SYSTEM AND METHOD FOR ADJUSTING A POSITION OF A TEMPLATE
Publication number
20180149968
Publication date
May 31, 2018
Canon Kabushiki Kaisha
Byung-Jin Choi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT APPARATUS, FOREIGN PARTICLE REMOVAL METHOD, AND METHOD OF M...
Publication number
20150174816
Publication date
Jun 25, 2015
Canon Kabushiki Kaisha
Makoto Mizuno
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL