Makoto MURAMATSU

Person

Koshi City, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming insulating film, apparatus for processing substr...
- Patent number 11,823,897
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Makoto Muramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 11,693,319
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Insulating film forming method, insulating film forming device, and...
- Patent number 11,631,581
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Makoto Muramatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Computer storage medium to perform a substrate treatment method usi...
- Patent number 11,574,812
- Issue date Feb 7, 2023
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming insulating film, apparatus for processing substr...
- Patent number 11,315,784
- Issue date Apr 26, 2022
- Tokyo Electron Limited
- Makoto Muramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Facilitation of spin-coat planarization over feature topography dur...
- Patent number 10,622,267
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Ryan L. Burns
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 10,586,711
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method using a block copolymer containing a hyd...
- Patent number 10,418,242
- Issue date Sep 17, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 10,329,144
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method and heating apparatus
- Patent number 10,121,659
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and heating apparatus
- Patent number 9,859,118
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 9,810,987
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate treatment method, computer storage medium, and substrate...
- Patent number 9,748,101
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, computer readable storage medium and su...
- Patent number 9,741,583
- Issue date Aug 22, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method, pattern forming apparatus, and computer rea...
- Patent number 9,618,849
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method, pattern forming apparatus, and non-transito...
- Patent number 9,530,645
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of topography to direct assembly of block copolymers in grapho-...
- Patent number 9,418,860
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Mark H. Somervell
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and method of manufacturing semiconductor de...
- Patent number 8,168,377
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 8,084,372
- Issue date Dec 27, 2011
- Tokyo Electron Limited
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply nozzle, process liquid supply device and nozz...
- Patent number 7,326,299
- Issue date Feb 5, 2008
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 7,205,024
- Issue date Apr 17, 2007
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,726,775
- Issue date Apr 27, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,589,339
- Issue date Jul 8, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Spin coating apparatus including aging unit and solvent replacement...
- Patent number 6,248,168
- Issue date Jun 19, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240295821
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Hiroyuki Fujii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD...
- Publication number 20240288768
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING SEMICONDUCT...
- Publication number 20240126175
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240038533
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Hiroki TADATOMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20230077937
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Yusuke SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid Development of EUV Resists
- Publication number 20230078946
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Steven Grzeskowiak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220316059
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...
- Publication number 20220208547
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20220113628
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...
- Publication number 20210159074
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulating Film Forming Method, Insulating Film Forming Device, and...
- Publication number 20200211838
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20190341255
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20180269072
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACILITATION OF SPIN-COAT PLANARIZATION OVER FEATURE TOPOGRAPHY DUR...
- Publication number 20180096905
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Ryan L. Burns
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20180065843
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
- Publication number 20180019118
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20170287749
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...
- Publication number 20170133235
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
- Publication number 20160293403
- Publication date Oct 6, 2016
- Tokyo Electron Limited
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20160124307
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...
- Publication number 20150255271
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
- Publication number 20150228512
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
USE OF TOPOGRAPHY TO DIRECT ASSEMBLY OF BLOCK COPOLYMERS IN GRAPHO-...
- Publication number 20150111387
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Mark H. Somervell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...
- Publication number 20150072536
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...
- Publication number 20150062545
- Publication date Mar 5, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20120328273
- Publication date Dec 27, 2012
- Hisashi KAWANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND PATTERN FORMING DEVICE
- Publication number 20120207940
- Publication date Aug 16, 2012
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20090220898
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Kazuyuki MITSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20090053904
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING TREATMENT APPARATUS, SUBSTRATE TREATMENT SYSTEM, COATING TR...
- Publication number 20080176004
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Makoto MURAMATSU

Person

Patents Grantslast 30 patents

Method for forming insulating film, apparatus for processing substr...

Substrate processing method, substrate processing apparatus, and st...

Insulating film forming method, insulating film forming device, and...

Computer storage medium to perform a substrate treatment method usi...

Method for forming insulating film, apparatus for processing substr...

Facilitation of spin-coat planarization over feature topography dur...

Substrate processing method and computer storage medium

Substrate treatment method using a block copolymer containing a hyd...

Substrate treatment method, computer storage medium and substrate t...

Pattern forming method and heating apparatus

Pattern forming method and heating apparatus

Substrate treatment method, computer storage medium and substrate t...

Substrate treatment method, computer storage medium, and substrate...

Substrate treatment method, computer readable storage medium and su...

Pattern forming method, pattern forming apparatus, and computer rea...

Pattern forming method, pattern forming apparatus, and non-transito...

Use of topography to direct assembly of block copolymers in grapho-...

Pattern forming method and method of manufacturing semiconductor de...

Substrate processing method and computer storage medium

Process liquid supply nozzle, process liquid supply device and nozz...

Method of coating film, coating unit, aging unit, solvent replaceme...

Method of coating film, coating unit, aging unit, solvent replaceme...

Method of coating film, coating unit, aging unit, solvent replaceme...

Spin coating apparatus including aging unit and solvent replacement...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PHOTORESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD...

METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING SEMICONDUCT...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM

Hybrid Development of EUV Resists

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...

Insulating Film Forming Method, Insulating Film Forming Device, and...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

FACILITATION OF SPIN-COAT PLANARIZATION OVER FEATURE TOPOGRAPHY DUR...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

PATTERN FORMING METHOD AND HEATING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...

PATTERN FORMING METHOD AND HEATING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...

SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...

USE OF TOPOGRAPHY TO DIRECT ASSEMBLY OF BLOCK COPOLYMERS IN GRAPHO-...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

PATTERN FORMING METHOD AND PATTERN FORMING DEVICE

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...

SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

COATING TREATMENT APPARATUS, SUBSTRATE TREATMENT SYSTEM, COATING TR...