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Chemically amplified resist
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Patent number 5,580,695
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Issue date Dec 3, 1996
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Japan Synthetic Rubber Co., Ltd.
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Makoto Murata
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Radiation-sensitive composition
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Patent number 5,482,816
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Issue date Jan 9, 1996
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Japan Synthetic Rubber Co., Ltd.
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Makoto Murata
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Radiation-sensitive composition
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Patent number 5,332,650
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Issue date Jul 26, 1994
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Japan Synthetic Rubber Co., Ltd.
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Makoto Murata
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY