Makoto Nawata

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 9,607,874
- Issue date Mar 28, 2017
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 8,142,567
- Issue date Mar 27, 2012
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching system
- Patent number 6,444,087
- Issue date Sep 3, 2002
- Hitachi, Ltd.
- Makoto Nawata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating samples
- Patent number 6,329,298
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-processing method and an apparatus for carrying out the same
- Patent number 6,328,845
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Yutaka Ohmoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing method and apparatus
- Patent number 5,914,051
- Issue date Jun 22, 1999
- Hitachi, Ltd.
- Saburo Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing method and apparatus
- Patent number 5,804,033
- Issue date Sep 8, 1998
- Hitachi, Ltd.
- Saburo Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing method and apparatus
- Patent number 5,785,807
- Issue date Jul 28, 1998
- Hitachi, Ltd.
- Saburo Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of treating samples
- Patent number 5,770,100
- Issue date Jun 23, 1998
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma treatment apparatus
- Patent number 5,647,944
- Issue date Jul 15, 1997
- Hitachi, Ltd.
- Takeshi Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of treating samples
- Patent number 5,556,714
- Issue date Sep 17, 1996
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing apparatus
- Patent number 5,520,771
- Issue date May 28, 1996
- Hitachi, Ltd.
- Saburo Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of treating samples
- Patent number 5,380,397
- Issue date Jan 10, 1995
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma generating method and apparatus
- Patent number 5,276,386
- Issue date Jan 4, 1994
- Hitachi, Ltd.
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing method and apparatus
- Patent number 4,971,651
- Issue date Nov 20, 1990
- Hitachi, Ltd.
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor
- Patent number 4,631,106
- Issue date Dec 23, 1986
- Hitachi, Ltd.
- Norio Nakazato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 4,618,398
- Issue date Oct 21, 1986
- Hitachi, Ltd.
- Makoto Nawata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air separation method and apparatus therefor
- Patent number 4,530,708
- Issue date Jul 23, 1985
- Hitachi, Ltd.
- Norio Nakazato
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Temperature control method for reversing type heat exchanger group...
- Patent number 4,459,143
- Issue date Jul 10, 1984
- Hitachi, Ltd.
- Makoto Nawata
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160079043
- Publication date Mar 17, 2016
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150371825
- Publication date Dec 24, 2015
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20100192857
- Publication date Aug 5, 2010
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20100163181
- Publication date Jul 1, 2010
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of plasma etching
- Publication number 20020011464
- Publication date Jan 31, 2002
- Makoto Nawata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching system
- Publication number 20010050147
- Publication date Dec 13, 2001
- Makoto Nawata
- H01 - BASIC ELECTRIC ELEMENTS

Makoto Nawata

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Vacuum processing apparatus

Plasma etching system

Apparatus for treating samples

Plasma-processing method and an apparatus for carrying out the same

Microwave plasma processing method and apparatus

Microwave plasma processing method and apparatus

Microwave plasma processing method and apparatus

Method of treating samples

Microwave plasma treatment apparatus

Method of treating samples

Microwave plasma processing apparatus

Method of treating samples

Microwave plasma generating method and apparatus

Microwave plasma processing method and apparatus

Plasma processor

Dry etching method

Air separation method and apparatus therefor

Temperature control method for reversing type heat exchanger group...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

VACUUM PROCESSING APPARATUS

VACUUM PROCESSING APPARATUS

Method of plasma etching

Plasma etching system